The static and dynamic characteristics of waveguide photodetectors with an absorbing region based on InGaAs/GaAs quantum well-dots were studied at room temperature. The absorption band of InGaAs/GaAs quantum well-dots is in the spectral range from 900 to 1100 nm. The waveguide photodetectors have a width of 50 µm and a length of the absorbing region from 92 µm to 400 µm. A low dark current density (1.1 и 22 μA/cm^2 at -1 и -20 V) and cut off frequency of 5.6 GHz, limited by the time constant of a parasitic equivalent electric RC circuit, were obtained.
We have studied superluminescent diodes with simplified design and active region based on 5 or 7 layers of InGaAs/GaAs quantum well-dots (QWDs). Emission peaks of the individual QWD layers are shifted with respect to each other by 15-35 nm to provide as wide as possible emission line in a superluminescent mode with central wavelength of about 1 µm without significant spectral dips. For superluminescent diodes with the active region based on 5 and 7 QWD layers, the maximal value of full width at half maximum of emission spectrum was 92 and 103 nm respectively.
High-speed photodetectors (PDs) based on InGaAs/GaAs quantum well-dots (QWDs) nanostructures are investigated. The -3 dB bandwidth of 8.2 GHz at 905 nm has been demonstrated. It is shown that internal processes in QWDs make it possible to create a PD with a bandwidth of up to 12.5 GHz, and the processes of thermalization of carriers from QWD layers do not limit the speed at reverse biases of more than 5 V.
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