Представлены результаты теоретических и экспериментальных исследований свойств поверхности наноструктурированных плёнок на основе диоксида олова методами ИК-Фурье-спектроскопии, эллипсометрии, а также индикаторным методом распределения центров адсорбции. Для дополнительной постобработки наноструктурированных плёнок с целью активации адсорбционных центров использовано травление в индуктивно-связной плазме.
The results of theoretical and experimental studies of surface properties of nanostructured films based on tin dioxide using Fourier-transform infrared spectroscopy, ellipsometry and the indicator method of the distribution of adsorption centers are presented. Etching in inductively coupled plasma was used for additional post-processing of nanostructured films in order to activate the adsorption centers.
The possibility of replacing classical sol-gel operation methods of high-temperature annealing by photo-annealing using ultraviolet-range radiation has been analyzed. A technique for synthesizing hierarchically organized zinc oxide films using sol-gel technology based on the parallel combination of low-temperature treatment and UV photo-annealing is proposed. Spectroscopic studies of the qualitative composition of the film-forming sol and nanomaterials based on it, obtained on various types of substrates, have been carried out before and after initiation of photochemical reactions.
In the framework of a sol-gel technology we have been developed the joint and simultaneous synthesis of fractal silver nano- and microclusters and a matrix of ZnO metal oxide semiconductor material. We have demonstrated the possibility of flexible control of the size and fractal dimension of metal structures by changing the concentration of silver nitrate in the initial sol. The proposed approaches can be used in the manufacture of photocatalysts, thermistors, biosensors, as well as other instruments and devices of nano- and microsystem technology.
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