The plasma-chemical deposition of diamond-like carbon (DLC) films onto heavily boron-doped single-crystal p -type diamond (the concentration ~10^20 cm^–3) in CH_4 + Ar plasma is conducted. The deposition rate is 7 nm min^–1. The elemental composition and properties of the films are studied in detail. It is found that the films are enriched with hydrogen, possess a density of 2.4 g cm^–3, and exhibit an ultrasmooth surface (with a roughness of 0.4 ± 0.2 nm).

Известно, что слои алмазоподобного углерода DLC (diamond-like carbon) состоят из фракций углерода как с "графитовой" s-0.8ptp^2-гибридизацией электронных орбиталей, так и с "алмазной" s-0.8ptp^3-гибридизацией. Количественное соотношение s-0.8ptp^2- и s-0.8ptp^3-фракций сильно влияет на структурные, морфологические, прочностные, оптические и электрофизические свойства пленок. В данной работе исследуется возможность управления долями s-0.8ptp^2- и s-0.8ptp^3-гибридного углерода в пленках DLC, полученных методом плазмохимического осаждения на подложках монокристаллического кремния и алмаза. Демонстрируются способы варьирования доли s-0.8ptp^3-фракции как непосредственно in situ при получении пленки путем изменения мощности емкостного и индуктивно-связанного разрядов, так и ex situ с помощью термического отжига и электрического поля. Ключевые слова: алмазоподобный углерод, плазмохимическое осаждение, монокристалический алмаз, термический отжиг.

The work is devoted to X-ray diffraction research of defected niobium oxide nonuniform (NON) arrays and niobium oxide nanocolumns formed by electrochemical anodizing. The results obtained allow to make an assumption about the probable presence of significant amount of NbO, NbO0.7, Nb2O5 and small amount of NbO2, and Al in the composition of defected NON and the presence of all these substances in the nanocolumns of niobium oxide except NbO0.7, but in smaller quantities. A comparative analysis of the NON structure and the nanocolumns makes it possible to isolate, probably, significant amount of Nb0.94O0.06, Nb6O in the defective nanocolumns, which was not found in NON.

In this paper describes the process of manufacturing ohmic contacts to diamond-like carbon (DLC) layer by depositing of Au/Mo/Ti metal layers. Contacts had good mechanical and adhesive properties. Their contact resistivity ranged from 1.4 ∙ 10-4 to 6.4 ∙ 10-5 Ohm ∙ cm2 depending on the DLC layer thickness. The temperature dependence of the films sheet resistance was studied. It is shown that thin DLC layers provide better ohmic contact characteristics due to their more uniform graphitization during thermal annealing.