Изучены свойства многослойных зеркал Cr/Sc, синтезированных при пониженном значении электрической мощности на магнетронном разряде. Найдены модельные структурные параметры таких зеркал. Получен рекордный коэффициент отражения 21% на длине волны 3.12 nm. Ключевые слова: микроскопия, "водное окно", многослойные зеркала, рентгеновское излучение, магнетронное напыление.

The article is devoted to the development, fabrication and analysis of broadband Mo/Si and Mo/Be stack-design multilayer mirrors for the wavelength ranges of 11.1-13.8, 17–21 and 28–33 nm. It is shown that for these structures smooth reflection curves can be achieved in a small number of corrections of the technological process.

Multilayer interference structures acting as dispersion elements for a mirror spectrometer for a wavelength range of 7-30 nm have been calculated and synthesized. Three elements are implemented: for the range λ=7-12 nm – multilayer structure Mo/B4C (periods N=60; period thickness d=6.50 nm); for the range λ=11-18 nm – Mo/Be (N=50; d=9.83 nm) and for the range λ=17-30 nm – Be/Si/Al (N=40; d=18.2 nm). For the entire spectral range, an efficiency of more than 10% was obtained at a wavelength resolution of 0.15-1.0 nm.