In this study, we have analyzed the kinetics of wetting transitions in nanosized liquid films on the substrate surface in terms of the hydrodynamic model. In the region of metastable states, we have studied the regularities of equilibrium cluster formation and calculated the film thickness distribution. In the region of unstable states, the kinetics of phase transition leading to cluster formation has been explored. At the early stage, the holes of the thickness close to an equilibrium value are formed. Coalescence of holes causes redistribution of a substance in the film and leads to cluster formation. The kinetics of average size and concentration of the holes are calculated. For the clusters formed, the kinetics of average radius, average height, concentration, and their distribution function on radius and height have been studied.

In this study, the approach for nucleation rate calculation is developed on the basis of free energy density functional approach. The nucleation rate and characteristics of critical nucleus are calculated from results of composition field simulation, derived by the solution of deterministic or stochastic Cahn-Hilliard equation.