Представлены результаты исследований влияния на кинетику роста и полярность слоев GaN/Si(111) начальных условий при молекулярно-пучковой эпитаксии с плазменной активацией азота-условий нитридизации подложки Si(111), температуры роста GaN, стехиометрических условий роста GaN. Экспериментально установлено, что оптимальными начальными условиями эпитаксии GaN на подложках Si(111) является высокотемпературная нитридизация подложки Si(111), проводимая непосредственно перед ростом GaN. Показана во зможность управления полярностью GaN за счет соответствующего выбора роста в условиях с N-или Ga-обогащением на начальной стадии эпитаксии GaN/Si(111).
The electronic structure of the epitaxial GaN/Si(111) layers and the Li/GaN/Si(111) interface with a monolayer Li coverages has been studied in situ under ultrahigh vacuum conditions. The experiments were carried out using photoelectron spectroscopy with synchrotron radiation in the photon energy range 75 eV – 850 eV. The photoemission spectra in the valence band and the core levels of Ga 3d, N 1s, and Li 1s are studied for the monolayer Li coating. It is found that Li adsorption causes a significant decrease in the intensity of the photoemission line of the intrinsic surface state and the appearance of an induced surface state due to charge transfer between the adsorbed Li layer and surface Ga atoms. It has been found that the GaN/Si(111) surface has predominantly Ga polarity. The Li/GaN/Si(111) interface has a semiconductor character.
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