1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyroscope (BRG)

Cho, Jae Yoong; Woo, Jong-Kwan; He, Guangke; Yang, Donguk; Boyd, Christopher; Singh, Sajal; Darvishian, Ali; Shiari, Behrouz; Najafi, K.

doi:10.1109/memsys.2019.8870889

Cited by 29 publications

(11 citation statements)

References 6 publications

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“…Meanwhile, according to the variation rate of different types of damping loss between two temperatures, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253. 15 be an optimal temperature for minimum damping loss, and the resonator may reach the highest Q factor at a certain temperature, which are consistent with the theoretical calculations. Meanwhile, according to the variation rate of different types of damping loss between two temperatures, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253.15 K to 353.15 K.…”

Section: Resultssupporting

confidence: 88%

“…The representative products using cylindrical shell resonators include the InnaLabs Inc. INL-CVG series; the INL-CVG-GU200, in particular, has been reported to have bias stability of 0.03 • /h and ARW of 0.004 • /h 1/2 [14]. The University of Michigan has reported a micro birdbath shell resonator gyroscope with bias stability of 0.0103 • /h [15]. The fused silica cylindrical shell resonators, in particular, are a type of high-performance resonators with high Q factor, which have a simpler structure and are much easier to manufacture compared with hemispherical shell resonators.…”

Section: Introductionmentioning

confidence: 99%

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Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Peng¹,

Qiu²,

Luo³

et al. 2020

Sensors

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The fused silica cylindrical resonator is a type of axisymmetric resonator that can be used for Coriolis vibratory gyroscopes. Although the resonant frequency, frequency mismatch, and Q factor are natural properties of the resonator, they can change with temperature. Therefore, the temperature drift severely limits the detection accuracy and bias stability of the gyroscope. In this paper, the influence of temperature variation on the vibrational characteristics of fused silica cylindrical resonators was investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that at the temperature range from 253.15 K to 353.15 K, the resonant frequency linearly increased with temperature, the frequency mismatch remained unchanged, and the Q factor gradually increased till about 333.15 K, when it began to decrease. Meanwhile, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253.15 K to 353.15 K. This phenomenon was theoretically analyzed and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for the fused silica cylindrical resonator, to discover the influence of temperature variation on the resonant frequency, frequency mismatch, and Q factor, there are certain rules to follow and repeat. The relationship between temperature and frequency can be established, which provides the feasibility of using self-calibration based on temperature characteristics of the resonator for temperature drift compensations. Additionally, there is an optimum temperature that may improve the performance of the Coriolis vibratory gyroscope with the fused silica cylindrical resonator.

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Section: Resultssupporting

confidence: 88%

Section: Introductionmentioning

confidence: 99%

Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Peng¹,

Qiu²,

Luo³

et al. 2020

Sensors

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show abstract

“…Mode II was used in [ 13 , 14 , 15 , 16 , 17 ]. Among them, a BI of 0.83°/h was realized on a gyroscope with a 9 k Q-factor combined with mode-matching technology [ 13 ].…”

Section: Introductionmentioning

confidence: 99%

Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method

Guo

Fan

et al. 2022

Micromachines

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The quadrature coupling error is an important factor that affects the detection output of microelectromechanical system (MEMS) gyroscopes. In this study, two quadrature error control methods, quadrature force-to-rebalance control (Mode I) and quadrature stiffness control (Mode II) were analyzed. We obtained the main factors affecting the zero-rate output (ZRO) under force-to-rebalance (FTR) closed-loop detection. The analysis results showed that the circuit phase delay in Mode I caused the quadrature channel to leak into the in-phase channel. However, in Mode II, the quadrature coupling stiffness was corrected in real time, which effectively improved the stability of the ZRO. The changes in the vibration displacement and Q-factor were the main factors for the ZRO drift in Mode II. Therefore, we propose an online compensation method for ZRO drift based on multiparameter fusion. The experimental results on a cobweb-like disk resonator gyroscope (CDRG) with a 340 k Q-factor showed that the bias instability (BI) of Mode II was significantly better than that of Mode I. After online compensation, the BI reached 0.23°/h, and the bias repeatability reached 3.15°/h at room temperature.

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“…In this mode, the gyroscope measures the angular rotation rate by forcing one of its resonance modes to vibrate and detect the Coriolis force-induced vibration of the second mode [ 4 , 5 , 6 , 7 ]. The most representative MEMS gyroscopes in FTR mode are the Disk Resonator Gyroscope (DRG) reported by Boeing [ 8 ] with a bias stability of 0.012

/h and the micro hemispherical resonator gyroscope reported by the University of Michigan [ 9 ] with a bias stability of 0.0103

/h. Although the FTR mode has excellent performance in rate measurement, it suffers from limited dynamic range and accumulative errors [ 10 , 11 , 12 ].…”

Section: Introductionmentioning

confidence: 99%

Damping Asymmetry Trimming Based on the Resistance Heat Dissipation for Coriolis Vibratory Gyroscope in Whole-Angle Mode

Guo

Zhang

et al. 2020

Micromachines

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Damping asymmetry is one of the most important factors that determines the performance of Coriolis Vibratory Gyroscope. In this paper, a novel damping tuning method for the resonator with parallel plate capacitors is presented. This damping tuning method is based on resistance heat dissipation and the tuning effect is characterized by the control force in Whole-Angle mode. As the damping tuning and stiffness tuning in the resonator with parallel plate capacitors are coupled with each other, a corresponding tuning system is designed. To verify the tuning effects, experiments are conducted on a hemispherical resonator gyroscope with Whole-Angle mode. The damping tuning theories is demonstrated by the testing results and 87% of the damping asymmetry is reduced by this tuning method with a cost of 3% decaying time. Furthermore, the angle-dependent drift in rate measurement after tuning is only 15.6% of the one without tuning and the scale factor nonlinearity decreases from 5.49 ppm to 2.66 ppm. The method can be further applied on the damping tuning in other resonators with symmetrical structure.

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1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyroscope (BRG)

Cited by 29 publications

References 6 publications

Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method

Damping Asymmetry Trimming Based on the Resistance Heat Dissipation for Coriolis Vibratory Gyroscope in Whole-Angle Mode

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