100-kHz diffraction-limited femtosecond laser micromachining

Sanner, N.; Huot, N.; Audouard, Éric; Larat, Christian; Laporte, P.; Huignard, J.-P.

doi:10.1007/s00340-004-1697-x

Cited by 24 publications

(2 citation statements)

References 23 publications

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“…A wavefront correction of the amplified femtosecond laser chain is performed 17 . The measured incident aberrated wavefront presents a peak-valley deviation of PV = λ/2 with a rms standard deviation of σ = λ/12, as shown in Figure 2a.…”

Section: Wavefront Correction Resultsmentioning

confidence: 99%

Spatial beam shaping of femtosecond pulses with an optically addressed light valve

et al. 2005

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We propose a versatile set-up dedicated to programmable beam shaping of femtosecond pulses in a focal plane. A non-pixelated liquid-crystal light valve is used as the phase-front modulator. We demonstrate active and adaptive wavefront correction of a 4-µJ, 100-kHz amplified laser chain, where residual wavefront distorsions are decreased down to λ/15 peak-valley and λ/100 rms. The subsequent improvement for micromachining applications is investigated, and diffraction-limited holes are demonstrated on various materials. Moreover, beam patterning in the focal plane is also presented. Theoretical calculations of the required phase modulation are proposed, and experimental shapes are demonstrated, like square and circular top-hats, as well as triangle or doughnut shapes.

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Section: Wavefront Correction Resultsmentioning

confidence: 99%

Spatial beam shaping of femtosecond pulses with an optically addressed light valve

et al. 2005

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“…An adaptive optical element may be used to correct for depth dependent spherical aberration, by imposing on an incident wavefront a phase profile that is equal and opposite to the aberration introduced by the refractive index mismatch at the sample surface. Previously, both a membrane deformable mirror (DM) [13,14] and a liquid crystal spatial light modulator (SLM) [8,15,16] have been used for aberration correction in laser fabrication systems. A DM provides a continuous phase distortion with large amplitude, but typically has a low number of actuators with which to finely control the mirror shape.…”

Section: Introductionmentioning

confidence: 99%

Three dimensional laser microfabrication in diamond using a dual adaptive optics system

Simmonds¹,

Salter²,

Jesacher³

et al. 2011

Opt. Express

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Femtosecond laser fabrication of controlled three dimensional structures deep in the bulk of diamond is facilitated by a dual adaptive optics system. A deformable mirror is used in parallel with a liquid crystal spatial light modulator to compensate the extreme aberrations caused by the refractive index mismatch between the diamond and the objective immersion medium. It is shown that aberration compensation is essential for the generation of controlled micron-scale features at depths greater than 200 μm, and the dual adaptive optics approach demonstrates increased fabrication efficiency relative to experiments using a single adaptive element.

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Ultrafast Laser Micro- and Nanostructuring

Kautek

Forster

2010

Laser Precision Microfabrication

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100-kHz diffraction-limited femtosecond laser micromachining

Cited by 24 publications

References 23 publications

Spatial beam shaping of femtosecond pulses with an optically addressed light valve

Spatial beam shaping of femtosecond pulses with an optically addressed light valve

Three dimensional laser microfabrication in diamond using a dual adaptive optics system

Ultrafast Laser Micro- and Nanostructuring

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