16.5 A flexible thin-film pixel array with a charge-to-current gain of 59µA/pC and 0.33% nonlinearity and a cost effective readout circuit for large-area X-ray imaging

Roose, Florian De; Myny, Kris; Willigems, Myriam; Piessens, Tim; Genoe, Jan; Dehaene, Wim

doi:10.1109/isscc.2016.7418024

Cited by 16 publications

(17 citation statements)

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“…Metals are some of the most commonly employed materials as conductors in both flexible and stretchable sensors. Copper (Cu) [7,8], gold (Au) [9][10][11][12][13], molybdenum (Mo) [14,15], silver (Ag) [16][17][18][19][20], platinum (Pt) [21,22], chromium (Cr) [23,24], aluminium (Al) [25][26][27][28], nickel (Ni) [11,29] and magnesium (Mg) [30,31] have all been widely used due to their intrinsic electrical conductivity and high mechanical stability under bending stress down to micrometer scale [32]. Au has been extensively used in the form of thin-film metallic contacts due to its resistance to oxidation.…”

Section: Metalsmentioning

confidence: 99%

“…Among metal oxide semiconductors, the most widely used material in flexible sensors as a TFT channel is amorphous indium-gallium-zinc-oxide (a-IGZO) [14,15,23,24,32,33], while ZnO is widely used for electromagnetic radiation sensors [21,73,74,[168][169][170][171][172]. Other metal oxides which have also been used in flexible sensors as semiconductors are indium-zinc-oxide (IZO) [173,174], and tin-oxide (SnO) [175][176][177].…”

Section: Metal Oxide Semiconductorsmentioning

confidence: 99%

“…The wide adoption of n-type a-IGZO for flexible circuits and sensors arises from its mechanical stability when bent down to micrometre range radius [180], and low temperature processing options such as DC sputtering [14,181], RF sputtering [15,23,33,36], and solution methods [182,183], resulting in large area and polymer processing compatibility. In addition, electron mobilities in excess of 70 cm 2 V -1 s -1 [184], and I on /I off above 10 10 have been reported [185].…”

Section: Metal Oxide Semiconductorsmentioning

confidence: 99%

“…Dielectric materials are typically employed in flexible sensors as part of field-effect transistors used to detect or process the desired signals, as well as part of capacitive sensors. Dielectrics compatible with flexible substrates are either inorganic, such as Al 2 O 3 [23,33,34,217,237], SiO 2 [14,15,28,30,31,34,217,218,222], HfO 2 [289,290], TiO 2 [13], or organic materials e.g., polyvinylphenol (PVP) [29,239], polyvinylpyrrolidone [170], poly(perfluorobutenylvinylether) CYTOP [10,291], PDMS [25], polylactide (PLA) [292,293], poly(vinylidene fluoride) PVDF [294][295][296], PVDF-Trifluoroethylene (PVDF-TrFE) [11,[297][298][299][300][301][302], or GO [303]. Al 2 O 3 is widely used in flexible sensors due to the possibility to deposit this material using atomic layer deposition (ALD) at room temperature (33 • C) and obtain dense (2.5 g/cm 3 ) films with a dielectric constant of 7.5, a breakdown voltage of 3.7 MV/cm and leakage currents below 10 -7 A/cm 2 (5 V bias) [304].…”

Section: Dielectricsmentioning

confidence: 99%

“…In comparison, sol-gel, spin-coated TiO 2 films exhibited a dielectric constant of 27 and a leakage current of roughly 10 -7 A/cm 2 (2 V bias) when annealed at 250 • C [13]. SiO 2 has been extensively used in flexible sensors [14,15,28,30,31,34,217,218,222] due to its well established properties and fabrication methods, but it presents a dielectric constant of 3.9 which is lower than other inorganic dielectrics [306]. Regarding organic dielectrics, this class of materials typically presents lower dielectric constants e.g., PVP (3.6) [307], CYTOP (2.1-2.2) [308], and PVDF-TrFE (10.4) [309].…”

Section: Dielectricsmentioning

confidence: 99%

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Flexible Sensors—From Materials to Applications

et al. 2019

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Flexible sensors have the potential to be seamlessly applied to soft and irregularly shaped surfaces such as the human skin or textile fabrics. This benefits conformability dependant applications including smart tattoos, artificial skins and soft robotics. Consequently, materials and structures for innovative flexible sensors, as well as their integration into systems, continue to be in the spotlight of research. This review outlines the current state of flexible sensor technologies and the impact of material developments on this field. Special attention is given to strain, temperature, chemical, light and electropotential sensors, as well as their respective applications.

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Section: Metalsmentioning

confidence: 99%

Section: Metal Oxide Semiconductorsmentioning

confidence: 99%

Section: Metal Oxide Semiconductorsmentioning

confidence: 99%

Section: Dielectricsmentioning

confidence: 99%

Section: Dielectricsmentioning

confidence: 99%

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Flexible Sensors—From Materials to Applications

et al. 2019

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Recent Progress of Flexible Image Sensors for Biomedical Applications

2021

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irradiating X-rays, have become indispensable approaches for diagnosing diseases. [4] Other similar applications may include imaging based on positron emission tomography using gamma rays, [10] deep ultraviolet resonant Raman imaging of a cell, [11] histopathology images using visible light, [12] and electroencephalography through nearinfrared (NIR) light [13] (Figure 1).An image sensor, or an imager, is an essential electronic device that supports such type of bioimaging technology. Image sensors have two main components: single or multiple optical sensors (for detecting light) and circuits (for reading the output from optical sensors). Multiple optical sensors are arranged in an array with specific rows and columns. By reading light signals from the sensors using readout circuits, the spatial and/or temporal distribution-localization of biological information is determined, while its dynamics can be analyzed as an image. Two important applications of such bioimaging techniques are static imaging, which involves techniques, such as X-ray and CT, and dynamic imaging, which concerns object detection such as pulse, [14] blood oxygen levels, [15,16] and blood flow. [17] In static imaging, the imaging speed is not required as only little dynamic movements exist, but it requires high resolution and high sensitivity. Meanwhile, in dynamic imaging, high resolution is not required, but high-speed imaging is essential (Figure 2).Recently, the miniaturization of semiconductor devices has led to the development of imaging devices for wearable electronics. As a typical example, a smartwatch integrates small optical sensors that can continuously monitor biological information, such as pulse, blood pressure, and blood oxygen levels, for the long-term by simply wearing the sensors in direct contact with the skin.The flexibility of image sensors is improving to reduce the discomfort caused by such wearable electronics. Because hard and heavy devices cause relatively high discomfort, their prolonged and continuous use increases the psychological and physical burden on the user. Thus, a flexible imaging device that uses soft materials and thin substrates to reduce the device thickness and weight is an effective approach for load reduction. Further, flexible devices are easier to bend and attach to the bioplane than traditional solid devices. Consequently, problems of inaccuracy or intermittency of data acquisition caused by fluctuations in the physical distance between the target skin surface and the device can be reduced. Therefore, flexible imaging Flexible image sensors have attracted increasing attention as new imaging devices owing to their lightness, softness, and bendability. Since light can measure inside information from outside of the body, optical-imaging-based approaches, such as X-rays, are widely used for disease diagnosis in hospitals. Unlike conventional sensors, flexible image sensors are soft and can be directly attached to a curved surface, such as the skin, for continuous measurement of biometric information wi...

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Amorphous silicon 3‐D one‐transistor active pixel sensor enabling large area imaging

et al. 2021

J Soc Info Display

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In large area imaging, an active pixel sensor (APS) is commonly used to achieve high signal-to-noise ratio (SNR) through an in-pixel thin-film transistor (TFT) amplifier. Since there is a trade-off between SNR and spatial resolution, the challenge of achieving both high resolution and high SNR remains.To resolve this, a 3-D one-TFT APS architecture is proposed, and a 256 Â 256 image sensor array with a fill factor of $100%, a high gain of >10 3 , and a high resolution of 110 ppi is presented.

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16.5 A flexible thin-film pixel array with a charge-to-current gain of 59µA/pC and 0.33% nonlinearity and a cost effective readout circuit for large-area X-ray imaging

Cited by 16 publications

References 4 publications

Flexible Sensors—From Materials to Applications

Flexible Sensors—From Materials to Applications

Recent Progress of Flexible Image Sensors for Biomedical Applications

Amorphous silicon 3‐D one‐transistor active pixel sensor enabling large area imaging

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