16-Core Recirculating Programmable Si Photonic MEMS

Kim, D. Y.; Park, Young J.; Kim, Dong U.; Hong, Myung S.; Takabayashi, Alain Yuji; Jeong, Yoon-Su; Park, Jongwoo; Han, Seungjun; Quack, Niels; Yu, Kyoungsik; Han, Sangyoon

doi:10.1364/cleo_si.2021.sth1q.6

Cited by 3 publications

(2 citation statements)

References 4 publications

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“…Importantly, it does not generate heat and therefore, eliminates crosstalk between unit devices, facilitating high-density integration. Numerous works have successfully demonstrated energy-efficient optical devices and systems using MEMS, demonstrating its feasibility in integrated photonics [27][28][29][30][31][32] . However, so far, the MEMS-based approaches have been limited to either optical switching devices 33 or standalone phase shifters 28 .…”

Section: Introductionmentioning

confidence: 99%

Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Park,

Her,

Jeong

et al. 2023

Preprint

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The Fabry-Pérot interferometer, a fundamental component in optoelectronic systems, offers interesting applications such as sensors, lasers, and filters. In this work, we show a tunable Fabry-Pérot cCavity consisting of tunable Sagnac loop reflectors (SLR) and a phase shifter based on electrostatic microelectromechanical actuators. The fabrication process of the device is compatible with the standard wafer-level passive silicon photonics platform. The electrical power and energy consumption of the device are extremely low, measuring less than 675nW of static power, and the energy needed for tuning is below 20 pJ. This electrostatic actuation mechanism provides well-balanced, scalable pathways for efficient tuning methodologies. The extinction ratio of the continuously tunable SLR's reflectivity is larger than 20 dB. Full 2π phase shifting is achieved, and all component's actuation times are less than 25 μs.

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Section: Introductionmentioning

confidence: 99%

Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Park,

Her,

Jeong

et al. 2023

Preprint

Self Cite

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“…Furthermore, optomechanical coupling and optical forces can be harnessed, for uses such as particle manipulation, telecommunication, or on-chip nonreciprocal transmission [10][11][12]. Movable and tunable Si photonic microelectromechanical (MEMS) components also show promise as lowpower and compact reconfigurable photonic building blocks for large scale programmable photonic circuits that can be reprogrammed for a variety of optical functions [13][14][15][16][17][18][19], i.e. generic Field-Programmable Photonic Integrated Circuits (FP-PIC), similar to field-programmable gate arrays (FPGA) in electronics.…”

Section: Introductionmentioning

confidence: 99%

Wafer-level hermetically sealed silicon photonic MEMS

Edinger

Bleiker

et al. 2022

Photon. Res.

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The emerging fields of silicon (Si) photonic micro-electromechanical systems (MEMS) and optomechanics enable a wide range of novel high-performance photonic devices with ultra-low power consumption, such as integrated optical MEMS phase shifters, tunable couplers, switches, and optomechanical resonators. In contrast to conventional SiO2-clad Si photonics, photonic MEMS and optomechanics have suspended and movable parts that need to be protected from environmental influence and contamination during operation. Wafer-level hermetic sealing can be a cost-efficient solution, but Si photonic MEMS that are hermetically sealed inside cavities with optical and electrical feedthroughs have not been demonstrated to date. Here, we demonstrate wafer-level vacuum sealing of Si photonic MEMS inside cavities with ultra-thin caps featuring optical and electrical feedthroughs that connect the photonic MEMS on the inside to optical grating couplers and electrical bond pads on the outside. We used Si photonic MEMS devices built on foundry wafers from the iSiPP50G Si photonics platform of IMEC, Belgium. Vacuum confinement inside the sealed cavities was confirmed by an observed increase of the cut-off frequency of the electro-mechanical response of the encapsulated photonic MEMS phase shifters, due to reduction of air damping. The sealing caps are extremely thin, have a small footprint, and are compatible with subsequent flip-chip bonding onto interposers or printed circuit boards (PCBs). Thus, our approach for sealing of integrated Si photonic MEMS clears a significant hurdle for their application in high-performance Si photonic circuits.

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Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Park,

Her,

Jeong

et al. 2024

Microsyst Nanoeng

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The Fabry-Pérot interferometer, a fundamental component in optoelectronic systems, offers interesting applications such as sensors, lasers, and filters. In this work, we show a tunable Fabry-Pérot cavity consisting of tunable Sagnac loop reflectors (SLRs) and phase shifters based on electrostatic microelectromechanical (MEMS) actuator. The fabrication process of the device is compatible with the standard wafer-level silicon photonics fabrication processes. This electrostatic actuation mechanism provides well-balanced, scalable pathways for efficient tuning methodologies. The extinction ratio of the continuously tunable SLRs’ reflectivity is larger than 20 dB. Full 2π phase shifting is achieved, and response times of all the components are less than 25 μs. Both actuators have extremely low static power, measuring under 20 fW and the energy needed for tuning is both below 20 pJ.

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16-Core Recirculating Programmable Si Photonic MEMS

Cited by 3 publications

References 4 publications

Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Wafer-level hermetically sealed silicon photonic MEMS

Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

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