259 Second ring-down time and 4.45 million quality factor in 5.5 kHz fused silica birdbath shell resonator

Nagourney, Tal; Cho, Jae Yoong; Shiari, Behrouz; Darvishian, Ali; Najafi, K.

doi:10.1109/transducers.2017.7994167

Cited by 40 publications

(16 citation statements)

References 16 publications

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“…One recent technique used by the author for forming 3D structures from fusedsilica is the very old technology of glass blow torching [13]. Extremely high-quality and smooth fused-silica 3D wine-glass resonant structures are fabricated and demonstrated a high qualityfactor of almost 10 million [19]. Figure 4 shows the photograph of two fused-silica birdbath resonators with diameters of 2.5 and 5mm, and a thickness in the range of 10-80 µm.…”

Section: Figure 3: Evolution Of Silicon Mems Sensors and Actuators From Bulk Silicon To Thin-film Polysilicon Medium Thickness Soi Silicomentioning

confidence: 99%

Wireless Integrated Micro Systems (Wims): Past, Present, Future

Najafi¹

2018

2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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Wireless integrated microsystems (WIMS), also referred to with many names such as IoT/IoE, sensor nodes/motes, or smart nodes, represent portable and stand-alone devices that contain sensors, actuators, signal processing electronics, communication electronics, packaging, and power sources. During the past few years they have become an instrumental part of extending the microelectronics revolution that started many decades ago with the advent of integrated circuits. This paper reviews the past achievements in sensors/actuators, low-power electronics, wireless interfaces, packaging, and provides a perspective on the future trends in both technology and applications for these sensing microsystems and high-performance micro-instruments.

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Section: Figure 3: Evolution Of Silicon Mems Sensors and Actuators From Bulk Silicon To Thin-film Polysilicon Medium Thickness Soi Silicomentioning

confidence: 99%

Wireless Integrated Micro Systems (Wims): Past, Present, Future

Najafi¹

2018

2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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“…A MEMS vibratory gyroscope utilizes the interaction between two or more vibratory modes of a device in a rotating reference frame due to the Coriolis effect in order to provide a measurement of angular rate about a given axis. In recent years, extensive research has been conducted on high performance gyroscopes with different structures, such as the disk resonator gyroscope (DRG) [1], [2], bulk-acoustic wave (BAW) gyroscope [3], quad mass (QMG) [4], and birdbath gyroscope (BRG) [5], [6]. While the chosen topology can be very different, all of these different designs have leveraged a combination of attributes: structural symmetry, high Q factors associated with drive/sense modes of interest that are closely matched prior to tuning and optimizing other relevant features such as drive velocity amplitude and environmental immunity to shock and vibration and/or temperature, integration with low-noise readout electronics and active control of the response in the drive/sense modes.…”

Section: Introductionmentioning

confidence: 99%

Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope

Parajuli

Sobreviela²,

Pandit³

et al. 2021

J. Microelectromech. Syst.

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This paper reports on the experimental characterization of a vacuum packaged bulk acoustic wave disk gyroscope with T-shape anchors fabricated on a (100) single-crystal silicon substrate. Improvements in key device performance parameters are achieved by implementing mode matching using electrostatic frequency tuning to decrease the frequency split between two near-degenerate bulk acoustic modes from 4 Hz to 0.4 Hz. Gyroscopic operation is demonstrated by driving one of the secondary degenerate elliptical modes while sensing the response in the other elliptical mode, both demonstrating quality factors exceeding 1 million at an operating frequency of ∼ 976 kHz. As a result, the mechanical sensitivity of the gyroscope is improved by a factor of 7.76 times for near mode-matched operation relative to the case with no tuning of the frequency spacing between the modes. Additionally, the angle random walk and bias instability were improved from 0.042 • / √ h to 0.037 • / √ h and 1.65 • /h to 0.95 • /h respectively, benchmarking favorably with respect to the state-of-the-art of BAW disk gyroscopes.

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“…Although mode matching can be achieved by electrostatic tuning, a small initial frequency split is desirable and necessary considering the limit of electrical adjusting ability. Therefore, most researchers used isotropic materials such as polysilicon [3], (111) single crystal silicon (SCS) [4] and fused silica [5] to fabricate wine glass‐mode MEMS gyroscope avoiding the large frequency split due to the discrepancy of Young's modulus at different crystal orientations. However, some manufacturing processes generally need to be redesigned for these isotropic materials such as etching [3], bonding and packaging [5].…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, most researchers used isotropic materials such as polysilicon [3], (111) single crystal silicon (SCS) [4] and fused silica [5] to fabricate wine glass-mode MEMS gyroscope avoiding the large frequency split due to the discrepancy of Young's modulus at different crystal orientations. However, some manufacturing processes generally need to be redesigned for these isotropic materials such as etching [3], bonding and packaging [5]. To simplify the manufacturing process, improve the yield rate, save the design cost and development cycle at the same time, Ahn [6], Schwartz and Shu have tried to use anisotropic materials (100) SCS to wine glass-mode MEMS gyroscope based on the standard process [7,8].…”

mentioning

confidence: 99%

Initial frequency split reduction of MEMS ring gyroscope based on cascaded springs geometrical compensation

et al. 2019

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Small initial frequency split is preferred to reduce the complexity of control circuits and enhance the device sensitivity for mode-matching MEMS gyroscopes. A microring gyroscope with cascaded rectangular beams as supporting springs fabricated by (100) single crystal silicon (SCS) is presented. Frequency split due to the anisotropic of Young's modulus of (100) SCS is geometrically compensated by adjusting the width of cascaded springs and adding an extra mass. The rectangular beams are designed to be wide enough to improve the immunity to fabrication imperfections, obtaining good manufacturing repeatability. The proposed method can largely attenuate the frequency difference of the gyroscope by using (100) SCS, which can reduce the processing cost and be easily integrated with CMOS circuit compared with (111) SCS. The test results show that the average initial frequency split of 15 different devices is 5.1 Hz for the ∼10,430 Hz resonant frequency. The minimum and maximum splits are 2.3 Hz (0.022%) and 7.3 Hz (0.069%), respectively, with the standard deviation of 1.3 Hz.

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259 Second ring-down time and 4.45 million quality factor in 5.5 kHz fused silica birdbath shell resonator

Cited by 40 publications

References 16 publications

Wireless Integrated Micro Systems (Wims): Past, Present, Future

Wireless Integrated Micro Systems (Wims): Past, Present, Future

Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope

Initial frequency split reduction of MEMS ring gyroscope based on cascaded springs geometrical compensation

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