Initial frequency split reduction of MEMS ring gyroscope based on cascaded springs geometrical compensation

Bai, Zesen; Cui, Jian; Zhao, Qiancheng; Yang, Zhenchuan; Yan, Guizhen

doi:10.1049/el.2019.1356

Cited by 10 publications

(4 citation statements)

References 9 publications

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“…The mode-matching technique based on electrostatic stiffness is the second classical way to suppress the frequency error of a symmetric gyroscope, first, by determining the degree of mismatch, then by picking the tuning voltage and reducing the frequency difference through P-I-D negative feedback [24,25,33,34]. The core of this type of technology lies in determining the tuning voltage given the amplitude-frequency response and phasefrequency response of the frequency response of the gyroscope control system.…”

Section: Electrostatic Stiffness-based Mode-matching Technologymentioning

confidence: 99%

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A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

Zhang

Chen

et al. 2022

Micromachines

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The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly improve accuracy. The highest accuracy is achieved when the ideal mode-matching state is realized. Due to the processing limitation, this index cannot be achieved, and we can only explore ways to approach this index continuously. This paper’s results of error suppression for the symmetric MEMS gyroscope are initially classified into three categories. The first category mainly introduces the processing structure and working mode of the symmetrical gyroscope. The second is mechanical tuning from the structure and the third is electrostatic tuning from the peripheral control circuit. Based on the listed results, the paper compares the two tuning modes and analyzes their advantages and disadvantages. The fourth category is the tuning means incorporating the emerging algorithm. On this basis, the elements of improvement for future high-precision symmetric MEMS gyroscopes are envisioned to provide a part of the theoretical reference for the future development direction of sensors in inertial navigation.

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Section: Electrostatic Stiffness-based Mode-matching Technologymentioning

confidence: 99%

“…This method of eliminating material defects was applied to the silicon-based material of the gyroscope. The result did change the resonant frequency of the polysilicon mechanical resonator and could improve the quality factor [24,25].…”

Section: Introductionmentioning

confidence: 99%

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

Zhang

Chen

et al. 2022

Micromachines

View full text Add to dashboard Cite

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“…Yoon et al [23] and Cao et al [10] fabricated a ring resonator supported by eight double U-shaped (capsule-shaped) beams connected to a central circular stem. Kou et al [24] designed S-shaped beams, Bai et al [25] designed tee-shaped beams, and Xiao et al [26] designed honeycomb-shaped beams. Khan et al [27] designed and fabricated a new ring resonator with a solid anchor and four supporting beams in the form of petals.…”

Section: Introductionmentioning

confidence: 99%

Modelling and dynamic analysis of a MEMS ring resonator supported by circular curved shaped inner beams

et al. 2023

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Microelectromechanical systems (MEMS) based ring shaped resonators usually have a ring supported by spoke shaped springs. In this paper, we developed a general analytical model that can determine the natural frequency of any MEMS ring resonator considering effective mass and stiffness of spokes in both radial and tangential displacements. Our model is also able to determine the stiffness of the circular curved beam with arbitrary central angle. The well-known energy based Castigliano’s method was used to calculate the stiffness of a circular curved beam considering both flexural and axial rigidities. The stiffness of a circular curved beam with different central angles was determined and compared with the literature and finite element method (FEM). The results show that for the case of a central angle of the curved beam larger than 60 degrees, the deviation between the FEM and analytical approach is less than 1%. The potential energy and kinetic energy of the outside ring and spokes were determined based on the displacement function. The natural frequency of a ring resonator with different number of circular curved beams in the form of petals in modes n=2 and n=3 were determined and the results were compared with a numerical approach using FEM. The deviations between the analytical approach and numerical method are less than 4%.

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“…The MEMS ring resonator with twodimensional symmetrical structure characteristic is well suited for the traditional MEMS manufacturing process and can achieve low-cost mass production [9]. Compared to MEMS tuning fork gyroscopes, ring gyroscopes with the symmetrical structure have the following prominent advantages [10][11][12]: (1) high sensitivity and less drift resulting from the same mode frequency and quality factor; (2) better resistance to external shocks and undesired vibrations. Therefore, the ring gyroscope is considered as a candidate for high-performance MEMS gyroscopes.…”

Section: Introductionmentioning

confidence: 99%

Design and Simulation of a Novel Single-Chip Integrated MEMS Accelerometer Gyroscope

et al. 2022

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This paper presents the design and simulation of a single-chip integrated MEMS accelerometer gyroscope by integrating a Coriolis vibratory ring gyroscope and a differential resonant accelerometer into one single-chip structure, measuring both the acceleration and the angular velocity (or the angle). At the same time, it has the advantages of small volume, low cost, and high precision based on the characteristics of a ring gyroscope and resonant accelerometer. The proposed structure consists of a microring gyroscope and a MEMS resonant accelerometer. Tthe accelerometer is located inside the gyroscope and the two structures are concentric. The operating mechanisms of the ring gyroscope and the resonant accelerometer are first introduced. Then, the whole structure of the proposed single-chip integrated accelerometer gyroscope is presented, and the structural components are introduced in detail. Modal analysis shows the resonant frequencies of upper and lower DETFs in resonant accelerometer are 28,944.8 Hz and 28,948.0 Hz, and the resonant frequencies of the ring gyroscope (n=2) are 15,768.5 Hz and 15,770.3 Hz, respectively. The scale factor of the resonant accelerometer is calculated as 83.5 Hz/g by the analysis of the input–output characteristic. Finally, the thermal analysis fully demonstrates that the single-chip integrated accelerometer gyroscope has excellent immunity to temperature change.

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Initial frequency split reduction of MEMS ring gyroscope based on cascaded springs geometrical compensation

Cited by 10 publications

References 9 publications

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies

Modelling and dynamic analysis of a MEMS ring resonator supported by circular curved shaped inner beams

Design and Simulation of a Novel Single-Chip Integrated MEMS Accelerometer Gyroscope

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