3D Microengineering via Laser Direct-Write Processing Approaches

Helvajian, Henry

doi:10.1016/b978-012174231-7/50067-1

Cited by 5 publications

(4 citation statements)

References 117 publications

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“…With the laser process it is possible to reduce the size of the formed crystals, to obtain structure sizes and resolutions below 5 lm [95]. Because no mask is needed, the laser allows a rapid prototyping [99]. Because no mask is needed, the laser allows a rapid prototyping [99].…”

Section: Laser-patterning Processmentioning

confidence: 99%

Microfabrication in Ceramics and Glass

Knitter

Dietrich

2006

Advanced Micro and Nanosystems

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The use of ceramics and glass as reactor materials is very promising for hightemperature and corrosive applications in microprocess engineering. Ceramic materials in particular demand more effort in the fabrication processes and joining techniques than metals or silicon. Notwithstanding these obstacles, several components have already been developed and successfully applied for chemical or thermal applications. Glass microreactors have been developed and manufactured over recent years by several companies. Several techniques, such as sand blasting, standard photolithography with wet etching have been used, as well as mechanical methods. A very interesting material is a photostructurable glass like FOTURAN, which allows the very accurate manufacture of fine channels and chambers with high aspect ratio. The manufactured structures are connected by diffusion bonding to form three-dimensional channel structures.

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Section: Laser-patterning Processmentioning

confidence: 99%

Microfabrication in Ceramics and Glass

Knitter

Dietrich

2006

Advanced Micro and Nanosystems

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“…9 Especially, some critical advantages of LMM include non-contact machining, ability to process wide range of materials and complex free-form (3D) surfaces that incorporate functional features with wide range of sizes and capabilities for in situ selective surface characteristic customisation. [1][2][3]5,9 In LMM, the critical demands for ARR are addressed through the integration of a wide range of laser sources in highly controllable direct-writing micro-machining platforms to realise the beam-workpiece relative movements. There are three main machine configurations in designing and implementing LMM platforms: (a) moving workpiece and stationary beam; (b) stationary workpiece and moving beam and (c) combination of both.…”

Section: Introductionmentioning

confidence: 99%

“…The demand for function integration and reliability of miniaturised devices has been increasing continuously over the recent years across a large number of application areas such as micro-electromechanical systems, micro-sensor systems and microelectronics. 1,2 Research and developments in material science and micro-machining processes (MMPs) are constantly advancing manufacturing capabilities in concerted actions to address these industrial requirements. In particular, manufacturing platforms are designed and implemented for production of components that incorporate different scale functional features down to submicron sizes and functionalised surfaces, while cost efficiency, products’ life cycle characteristics and environmental impact are major considerations in the process design and implementation.…”

Section: Introductionmentioning

confidence: 99%

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Generic software tool for counteracting the dynamics effects of optical beam delivery systems

Penchev

Dimov

Bhaduri

et al. 2016

Proceedings of the Institution of Mechanical Engineers, Part B:

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Laser micro-machining is a promising manufacturing solution for fabricating complex micro-engineering products in wide range of materials that incorporate different multi-scale functional features. Optical beam deflector systems are key components in laser micro-machining systems, and they are one of the main factors determining the processing speed and hence machining throughput. However, their performance is speed dependent and the negative dynamics effects have a direct impact on the laser micro-machining accuracy, repeatability and reproducibility. This article presents a generic software solution for minimising these negative dynamics effects, thus improving significantly the laser machining performance across the full range of available processing speeds. In particular, these improvements are achieved by introducing machine-specific compensations in machining vectors to counteract beam deflectors' inertia regardless of their directions, length and set process speed. An empirical model was developed to obtain data about the actual dynamic response of the beam deflection system across the full range of available processing speeds, and then based on these data, the proposed generic software was implemented into a stand-alone 'adaptive' postprocessor. The generation of machine executable part programs is automated, and it is only necessary for the user to enter the selected scanning speeds and beam diameters. Experimental validation was conducted to demonstrate the capability of the proposed software tool. The results demonstrate that substantial improvements can be obtained in machining quality by maintaining a constant pulse distance throughout the machining operations, while the dimensional accuracy is maintained across the available processing speeds without sacrificing the machining efficiency.

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Microreactors Constructed from Insulating Materials and Semiconductors

Schwesinger¹,

Freitag²

2009

Microchemical Engineering in Practice

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3D Microengineering via Laser Direct-Write Processing Approaches

Cited by 5 publications

References 117 publications

Microfabrication in Ceramics and Glass

Microfabrication in Ceramics and Glass

Generic software tool for counteracting the dynamics effects of optical beam delivery systems

Microreactors Constructed from Insulating Materials and Semiconductors

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