Generic software tool for counteracting the dynamics effects of optical beam delivery systems

Abstract

Laser micro-machining is a promising manufacturing solution for fabricating complex micro-engineering products in wide range of materials that incorporate different multi-scale functional features. Optical beam deflector systems are key components in laser micro-machining systems, and they are one of the main factors determining the processing speed and hence machining throughput. However, their performance is speed dependent and the negative dynamics effects have a direct impact on the laser micro-machining accuracy, repeatability and reproducibility. This article presents a generic software solution for minimising these negative dynamics effects, thus improving significantly the laser machining performance across the full range of available processing speeds. In particular, these improvements are achieved by introducing machine-specific compensations in machining vectors to counteract beam deflectors' inertia regardless of their directions, length and set process speed. An empirical model was developed to obtain data about the actual dynamic response of the beam deflection system across the full range of available processing speeds, and then based on these data, the proposed generic software was implemented into a stand-alone 'adaptive' postprocessor. The generation of machine executable part programs is automated, and it is only necessary for the user to enter the selected scanning speeds and beam diameters. Experimental validation was conducted to demonstrate the capability of the proposed software tool. The results demonstrate that substantial improvements can be obtained in machining quality by maintaining a constant pulse distance throughout the machining operations, while the dimensional accuracy is maintained across the available processing speeds without sacrificing the machining efficiency.

Femtosecond laser ablation of transparent microphotonic devices and computer-generated holograms

“…The optimized laser parameters for the micromachining of the Fresnel lens, the hologram and the gratings are provided in Table 1. Furthermore, to ensure a machining accuracy of ±10 µm, a customized software was used to minimize the dynamic effects of the beam delivery subsystem on machining results during the fabrication process [27,48,49]. The profile of grooves was measured by a G5 Alicona Infinite system by using a 50× objective.…”

“…The hydrophilicity of transparent devices can have a significant impact on the optical and electrical performance in a wide range of applications including selfcleaning [58,59], anti-fouling [60], anti-corrosion [61], anti-fogging [62], icephobicity [63], and drag reduction properties [64,65]. FS lasers can be employed not only to fabricate microphotonic devices but also modify the surface wettability resistance simultaneously, while this will require multisteps in other fabrication techniques [49].…”

Effects of Top-hat Laser Beam Processing and Scanning Strategies in Laser Micro-Structuring

“…However, Gaussian distribution partly contributes to the inherent shortcoming of laser micro-machining processes such as tapering effects at side walls and HAZ on the machined parts [4,5]. The tapering effects are present after most of laser processing applications with Gaussian beams, e.g., drilling [6,7] or micro-structuring (trenches, 3D structures) [8,9]. Such draft angles at side walls affect the geometric accuracy of produced structures and also can impact the functional performance.…”

“…The optimal hatch and pulse distances to achieve a good surface quality was determined after The laser delays were optimized to achieve the best possible structuring quality [9]. Five pockets were produced with each strategy and the processing parameters in Table 1 and the average results were analyzed in this research.…”

Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications

“…The positioning resolutions of the linear and rotary stages, as stated by the manufacturer, are 0.25 µm and 45 µrad, respectively [14]. The accuracy, repeatability, and reproducibility (ARR) achievable with the 3D scan head is better than +/− 5 µm across the full range of scanning speeds [15]. The LMM platform integrates a Yb-doped femtoseconds (fs) 5W laser source from Amplitude Systems that operates at a central wavelength of 1030 nm and has a maximum repetition rate of 500 KHz.…”