2016
DOI: 10.1088/1757-899x/114/1/012032
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3D Microfabrication Using Emulsion Mask Grayscale Photolithography Technique

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Cited by 4 publications
(2 citation statements)
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“…Biochips were fabricated using the emulsion mask grayscale photolithography process [40]. The biochip patterns were designed using CorelDraw X7.…”
Section: Biochip Fabricationmentioning
confidence: 99%
“…Biochips were fabricated using the emulsion mask grayscale photolithography process [40]. The biochip patterns were designed using CorelDraw X7.…”
Section: Biochip Fabricationmentioning
confidence: 99%
“…The technique has capabilities to produce arbitrary shape with high lateral and vertical resolution [18]. The use of one-step maskless photolithography technique also demonstrates several advantages in terms of its simplified process, time and cost saving as well as high throughput [19].…”
Section: Introductionmentioning
confidence: 99%