Extended Abstracts of the 2003 International Conference on Solid State Devices and Materials 2003
DOI: 10.7567/ssdm.2003.g-4-1
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3D System Integration by Chip-to-Wafer Stacking Technologies

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Cited by 4 publications
(4 citation statements)
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“…Three-dimensional (3D) chip-stacking technology is attracting a great deal of attention for realizing advanced, high-speed, compact, and highly functional electronic systems. [1][2][3][4][5] To realize the three-dimensionally stacked-chip system, a bonding technology that can form a number of bump connections with a pitch below 20 mm is required.…”
Section: Introductionmentioning
confidence: 99%
“…Three-dimensional (3D) chip-stacking technology is attracting a great deal of attention for realizing advanced, high-speed, compact, and highly functional electronic systems. [1][2][3][4][5] To realize the three-dimensionally stacked-chip system, a bonding technology that can form a number of bump connections with a pitch below 20 mm is required.…”
Section: Introductionmentioning
confidence: 99%
“…ESPN consists of one multiprocessor chip and two laser source chips connected by off-chip optical fibers and electrical wires on the PCB. The multiprocessor chip consists of three vertically stacked dies using 3D packaging technology [10]. The processor and caches die contains processor cores, private L1/L2 caches and electrical routers.…”
Section: An Overview Of Espnmentioning
confidence: 99%
“…Three dimensional (3D) chip-stacking technology is attracting a great deal of attention for realizing advanced high-speed, compact, and highly functional electronic systems. [1][2][3][4][5] For the development and the quality control of 3D stacked-chip systems, testing of bump connections is necessary. The connection test becomes important particularly when the process margin of the bonding process (such as the alignment margin, the parallelism between the chip holding tool and stage of the bonding machine, and the bump height deviation) becomes small.…”
Section: Introductionmentioning
confidence: 99%