2008 IEEE International Electron Devices Meeting 2008
DOI: 10.1109/iedm.2008.4796820
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6F<sup>2</sup> buried wordline DRAM cell for 40nm and beyond

Abstract: We present a 46nm 6F 2 buried word-line (bWL) DRAM technology, enabling the smallest cell size of 0.013um2 published to date. The TiN/ W buried word-line is built below the Si surface, forming a low resistive interconnect and the metal gate of the array transistors. We demonstrate high array device on-current, small parameter variability, high reliability and small parasitic capacitances, resulting in an excellent array performance. The array device can be scaled down to 30nm without compromising its performan… Show more

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Cited by 33 publications
(15 citation statements)
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“…None of these works show the impact of bitline coupling on retention time. In addition, [30] and [2] studied only DRAMs with a folded bitline architecture, while modern DRAMs use an open bitline architecture [22,24,32,33]. Open bitline architectures permit the use of smaller DRAM cells, improving DRAM density, but suffer from increased bitline-bitline coupling noise [33].…”
Section: Data Pattern Dependencementioning
confidence: 98%
“…None of these works show the impact of bitline coupling on retention time. In addition, [30] and [2] studied only DRAMs with a folded bitline architecture, while modern DRAMs use an open bitline architecture [22,24,32,33]. Open bitline architectures permit the use of smaller DRAM cells, improving DRAM density, but suffer from increased bitline-bitline coupling noise [33].…”
Section: Data Pattern Dependencementioning
confidence: 98%
“…We modeled the memory cell architecture (of 6F 2 area), the equalization circuit, the wordline driver, and the sense amplifier using the designs suggested in [18], [25] and [26]. The baseline DRAM configuration targets a 1Gb DDR3-1066 (533MHz) x8 memory with core timings of 7-7-7 cc (refer Section 4.1) at 45nm.…”
Section: Dram Cross-section Spice Simulationsmentioning
confidence: 99%
“…The access transistor of an STT-MRAM cell may be 56 times larger than that of the magnetic storage element [20], and 9 times larger than the entire DRAM cell [13]. To alleviate this effect, a crosspoint architecture was proposed [20], which amortizes the cost of large access transistors by sharing them among a number of storage elements.…”
Section: Introductionmentioning
confidence: 99%