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Photocatalytic Micropatterning of Transparent Ethylsilsesquioxane−Titania Hybrid Films

“…The micropatterning process of transparent coating films is becoming more important in the fabrication of micro-optic devices such as gratings, waveguides, and optical circuits. − The sol−gel process using metal alkoxides as starting materials has a great potential for the micropatterning of the coating films as well as for the preparation of photofunctional materials. − In the micropatterning process based on the sol−gel method, the embossing technique and photolithographic technique have been investigated so far. The former employs soft gel films, which are pressed with a stamper. − The latter uses photosensitive gel films, which are irradiated with UV light for hardening through a photomask. − In comparison with the embossing technique, the photolithographic one permits the formation of patterns with a precise shape of high resolution.…”

“…[1][2][3][4] The sol-gel process using metal alkoxides as starting materials has a great potential for the micropatterning of the coating films as well as for the preparation of photofunctional materials. [5][6][7] In the micropatterning process based on the sol-gel method, the embossing technique and photolithographic technique have been investigated so far. The former employs soft gel films, which are pressed with a stamper.…”