A two-stage monolithic W-band power amplifier using 0.1 -pm pseudomorphic AIGaAs/lnGaAs/GaAs T-gate power HEMT process has been designed, fabricated, and tested. This MMlC PA exhibits 8 dB linear gain and a maximum output power of 300mW with 10.5% peak power-added efficiency at 94GHz.The substrate thickness is 2 mil Eo take advantage of lower thermal resistance as well as smaller via holes and a more compact chip layout. To our knowledge, the 300-mW output power represents the highest output power for a single W-band power amplifier chip at this frequency.