A 1.5-V-supplied CMOS ASIC for the actuation of an electrostatic micromotor

Favrat, P.; Paratte, L.; Ballan, Hussein; Declercq, M.; Rooij, N. F. de

doi:10.1109/3516.622967

Cited by 13 publications

(3 citation statements)

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“…The impressive advance of technology at both the micrometer and nanometer scales requires the development of powerful and flexible modeling tools to help the designer of devices and systems [7], [10], [15]- [17]. For instance, in [13], a topology optimization method to design a piezoelectrically driven microgripper is proposed: four design criteria are considered, and the two-dimensional Pareto fronts trading off various pairs of criteria are identified by means of a genetic algorithm.…”

Section: Introductionmentioning

confidence: 99%

Evolutionary Computing and Optimal Design of MEMS

Barba

Wiak

2015

IEEE/ASME Trans. Mechatron.

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Fostered by the development of new technologies, microelectromechanical systems (MEMS) are massively present on board of vehicles, within information equipment as well as in medical and healthcare equipment. A smart approach to the design of MEMS devices is in terms of the simultaneous optimization of multiple objective functions subject to a set of constraints. This leads to the family of solutions minimizing the degree of conflict among the objectives (Pareto front). Accordingly, in this paper, a procedure of optimal shape design of MEMS based on evolutionary computing is proposed and validated on three case studies.Index Terms-Comb-drive electrostatic microactuator, electrothermo-elastic microactuator, field analysis and synthesis, finiteelement method, magnetic micromirror, microelectromechanical systems (MEMS), multiobjective optimal shape design.

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Section: Introductionmentioning

confidence: 99%

Evolutionary Computing and Optimal Design of MEMS

Barba

Wiak

2015

IEEE/ASME Trans. Mechatron.

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“…These applications are targeting a growing market including: HV aerospace Microsystems [1], small DC motor control [2], biomedical systems for Lab-on-Chip DNA samplers [3], ink jet printers [4] piezoelectric-based microrobot [5], etc. One application of special interest is fully integrated HV front-end interface for next generation medical ultrasound systems [6].…”

Section: Introductionmentioning

confidence: 99%

High-voltage DMOS integrated circuits using floating-gate protection technique

Chebli

El‐Sankary

Savaria

2009

Analog Integr Circ Sig Process

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An efficient low power protection scheme for thin gate oxide of high voltage (HV) DMOS transistor is presented. To prevent gate-oxide breakdown and protect HV transistor, the voltage controlling its gate must be within 5 V from the HV supply. Thus signals from the low voltage domain must be level shifted to control the gate of this transistor. Usually this level shifting involves complex circuits that reduce the speed besides requiring of large power and area. In this paper, a simple and efficient protection technique for gate-oxide breakdown is achieved by connecting a capacitor divider structure to the floating-gate node of HV transistor to increase its effective gate oxide thickness. Several HV circuits, including: positive and negative HV doublers and level-up shifters suitable for ultrasound sensing systems are built successfully around the proposed technique. These circuits were implemented with 0.8 lm CMOS/DMOS HV DALSA process. Simulation and experimental results prove the good functionality of the designed HV circuits using the proposed protection technique for voltages up to 200 V.

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“…The electrostatic micromotors contain: top-drive motor, side-drive motor, wobble motor, center-pin motor, flange motor [8], linear stepper motor [9], ultrasonic motor [10], double stator axial-drive variable capacitance motor [11], out-rotor motor [12], induction motor [13], and shuffle motor [14]. In addition, there are many methods for the driving of electrostatic micromotors [15]. Table 1 lists the various electrostatic micromotors.…”

Section: Introductionmentioning

confidence: 99%