A 10 Nano-G/Rt-Hz Resonant Mems Accelerometer Employing Anti-Aliasing Control

A Closed-Loop System for Resonant MEMS Sensors Subject to Blue-Sideband Excitation

“…Up to this point, virtually all resonant sensors employ a type of system that automatically generates an excitation frequency equal to the vibration mode, which can be the fundamental mode [16] or other modes [17]. With this configuration, the drive signal has the same frequency as the frequency of the motional current generated by the resonator.…”