This paper describes a highly energy-efficient Wheatstone bridge temperature sensor. To maximize sensitivity, the bridge is made from resistors with positive (silicided-diffusion) and negative (poly-silicon) temperature coefficients. The bridge is balanced by a resistive (poly-silicon) FIR-DAC, which forms part of a 2 nd -order Continuous-Time Delta-Sigma Modulator (CTΔΣM). Each stage of the modulator is based on an energy-efficient current-reuse OTA. To efficiently suppress quantization noise fold-back, the 1 st stage OTA employs a tail-resistor linearization scheme. Sensor accuracy is enhanced by realizing the poly-silicon arms of the bridge and the DAC from identical unit elements. Fabricated in a 180nm CMOS technology, the sensor draws 55μW from a 1.8V supply, and achieves a resolution of 150μKrms in an 8ms conversion time. This translates into a state-of-the-art resolution FoM of 10fJ•K 2 . Furthermore, the sensor achieves an inaccuracy of ±0.4°C (3σ) from −55°C to 125°C after a ratio-based 1-point trim and systematic non-linearity removal, which improves to ±0.1°C (3σ) after a 1 st -order fit.