A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence Tomography

Samuelson, Sean R.; Wu, Lei; Sun, Jingjing; Choe, Se-woon; Sorg, Brian S.; Xie, Huikai

doi:10.1109/jmems.2012.2209404

Cited by 39 publications

(48 citation statements)

References 34 publications

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“…The micromirror was packaged into an imaging probe for OCT with an outer diameter of 5.8 mm. With a new hidden actuator design, the die size was further reduced, yielding an OCT probe with a 2.8 mm diameter [30]. Figure 3 shows the packaging design and a photograph of the probe.…”

Section: Thermoelectric Actuationmentioning

confidence: 99%

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

Lin

Keeler

2015

Micromachines

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Microelectromechanical systems (MEMS) have an unmatched ability to incorporate numerous functionalities into ultra-compact devices, and due to their versatility and miniaturization, MEMS have become an important cornerstone in biomedical and endoscopic imaging research. To incorporate MEMS into such applications, it is critical to understand underlying architectures involving choices in actuation mechanism, including the more common electrothermal, electrostatic, electromagnetic, and piezoelectric approaches, reviewed in this paper. Each has benefits and tradeoffs and is better suited for particular applications or imaging schemes due to achievable scan ranges, power requirements, speed, and size. Many of these characteristics are fabrication-process dependent, and this paper discusses various fabrication flows developed to integrate additional optical functionality beyond simple lateral scanning, enabling dynamic control of the focus or mirror surface. Out of this provided MEMS flexibility arises some challenges when obtaining high resolution images: due to scanning non-linearities, calibration of MEMS scanners may become critical, and inherent image artifacts or distortions during scanning can degrade image quality. Several reviewed methods and algorithms have been proposed to address these complications from MEMS scanning. Given their impact and promise, great effort and progress have been made toward integrating MEMS and biomedical imaging.

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Section: Thermoelectric Actuationmentioning

confidence: 99%

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

Lin

Keeler

2015

Micromachines

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“…2(b). The MEMS mirror is based on electrothermal actuation and has four pairs of unique dual S-shaped bimorph structures to achieve dual-axis scan with a linear raster pattern [14]. A visible light is also coupled into the MEMS probe to indicate the scanning location by a 1:99 coupler.…”

Section: Endoscopic Oct Based On 2-axis Scanning Mems Mirrorsmentioning

confidence: 99%

Correction of image distortions in endoscopic optical coherence tomography based on two-axis scanning MEMS mirrors

Wang

Peng²,

Samuelson

et al. 2013

Biomed. Opt. Express

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A two-axis scanning microelectromechanical (MEMS) mirror enables an optical coherence tomography (OCT) system to perform threedimensional endoscopic imaging due to its fast scan speed and small size. However, the radial scan from the MEMS mirror causes various distortions in OCT images, namely spherical, fan-shaped and keystone distortions. In this paper, a new method is proposed to correct all of three distortions presented in OCT systems based on two-axis MEMS scanning mirrors. The spherical distortion is corrected first by directly manipulating the original spectral interferograms in the phase domain, followed by Fourier transform and three-dimensional geometrical transformation for correcting the other two types of distortions. OCT imaging experiments on a paper with square ink printed arrays and a glass tube filled with milk have been used to validate the proposed method. Distortions in OCT images of flat or curved surfaces can all be effectively removed.

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“…Several types of planar electrothermal MEMS mirrors with 1-axis or 2-axis scan capability have been extensively employed in side-viewing endoscopic OCT probes [15,[17][18][19]. A typical side-viewing endoscopic OCT probe is shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

“…A typical side-viewing endoscopic OCT probe is shown in Fig. 1(a) [19], where a planar MEMS micromirror chip is mounted on a 45° sloped ferrule inside the probe body to direct an optical beam to one side of the probe. To assemble the probe, a flexible PCB (FPCB) is first glued on the slope.…”

Section: Introductionmentioning

confidence: 99%

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Optical coherence tomography endoscopic probe based on a tilted MEMS mirror

Duan¹,

Tanguy²,

Pozzi³

et al. 2016

Biomed. Opt. Express

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This paper reports a compact microendoscopic OCT probe with an outer diameter of only 2.7 mm. The small diameter is enabled by a novel 2-axis scanning MEMS mirror with a preset 45° tilted angle. The tilted MEMS mirror is directly integrated on a silicon optical bench (SiOB). The SiOB provides mechanical support and electrical wiring to the mirror plate via a set of bimorph flexure, enabling a compact probe mount design without the requirement of a 45° slope, which is capable to dramatically reduce the probe size and ease the assembly process. Additionally, the SiOB also provides trenches with properly-designed opening widths for automatic alignment of the MEMS mirror, GRIN lens and optical fiber. The 45°-tilted MEMS mirror plate is actuated by four electrothermal bimorph actuators. The packaged 2.7 mm-diameter probe offers 2-axis side-view optical scanning with a large optical scan range of 40° at a low drive voltage of 5.5 Vdc in both axes, allowing a lateral scan area of 2.2 mm × 2.2 mm at a 3 mm working distance. High-resolution 2D and 3D OCT images of the IR card, ex vivo imaging of meniscus specimens and rat brain slices, in vivo imaging of the human finger and nail have been obtained with a TDOCT system.

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A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence Tomography

Cited by 39 publications

References 34 publications

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

Correction of image distortions in endoscopic optical coherence tomography based on two-axis scanning MEMS mirrors

Optical coherence tomography endoscopic probe based on a tilted MEMS mirror

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