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A microelectromechanical system (MEMS) mirror based endoscopic swept-source optical coherence tomography (SS-OCT) system that can perform three-dimensional (3-D) imaging at high speed is reported. The key component enabling 3-D endoscopic imaging is a two-axis MEMS scanning mirror which has a 0.8×0.8  mm2 mirror plate and a 1.6×1.4  mm2 device footprint. The diameter of the endoscopic probe is only 3.5 mm. The imaging rate of the SS-OCT system is 50  frames/s. OCT images of both human suspicious oral leukoplakia tissue and normal buccal mucosa were taken in vivo and compared. The OCT imaging result agrees well with the histopathological analysis.

A large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9mm × 1.9mm with a mirror aperture of 1 mm. The application optimized device holds key features of ultralow maximum tilt of 0.25°and a strongly linear motion of 90 µm achievable at only 1.2 V. This device is further characterized in an interferometric system to determine the piston mode and the accurate piston displacement as a function of voltage, power, and frequency.[ 2013-0112]Index Terms-Bimorph, microelectromechanical systems (MEMS), vertical displacement, piston.

We describe a novel dual-modality imaging approach that integrates diffuse optical tomography (DOT) and photoacoustic imaging (PAI) through a miniaturized handheld probe based on microelectromechanical systems (MEMS) scanning mirror. We validate this dual-modal DOT/PAI approach using extensive phantom experiments, and demonstrate its application for tumor imaging using tumor-bearing mice systematically injected with targeted contrast agents.

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