A mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface

Wu, Lei; Pais, Andrea; Samuelson, Sean R.; Guo, Shan; Xie, Huikai

doi:10.1109/sensor.2009.5285647

Cited by 18 publications

(25 citation statements)

References 9 publications

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“…A large vertical displacement (LVD) micromirrorwas designed to produce large scan range that allowed up to 308 μm effective in-system displacement [14]. This range is operable in a mirror-tilt insensitive interferometry system design including a corner-cube retroreflector and a dual-reflective MEMS mirror.…”

Section: Introductionmentioning

confidence: 99%

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Samuelson

Xie

2014

J. Microelectromech. Syst.

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A large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9mm × 1.9mm with a mirror aperture of 1 mm. The application optimized device holds key features of ultralow maximum tilt of 0.25°and a strongly linear motion of 90 µm achievable at only 1.2 V. This device is further characterized in an interferometric system to determine the piston mode and the accurate piston displacement as a function of voltage, power, and frequency.[ 2013-0112]Index Terms-Bimorph, microelectromechanical systems (MEMS), vertical displacement, piston.

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Section: Introductionmentioning

confidence: 99%

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Samuelson

Xie

2014

J. Microelectromech. Syst.

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“…For the lateral shift compensation and the corresponding vertical displacement, first we consider the segments as separate cantilever beams with lengths Li and arc angles ∅ where i = 1, …, 5. Assume all the segments start at O(0 0), and then the vectors of the end points of the five segments can be expressed as: (2) where and are respectively the lateral projection and vertical displacement for end tip of the ith segment, which are given by:…”

Section: Tilt/shift Analysis Of the Lsf Cu/w Bimorph Actuatormentioning

confidence: 99%

“…Microelectromechanical systems (MEMS) scanning mirrors are widely used in a variety of applications such as Fourier transform (FT) spectroscopy [1,2], confocal microscopy [3], optical coherence tomography [4,5], optical switches [6], and projection displays [7]. Scan range, speed, driving voltage, power consumption and footprint are among the key parameters for MEMS scanning mirrors.…”

Section: Introductionmentioning

confidence: 99%

“…Scan range, speed, driving voltage, power consumption and footprint are among the key parameters for MEMS scanning mirrors. In particular, MEMS-based FT spectrometers require vertical scanning of hundreds of micrometers for sufficient spectral resolution [2,8]. There are several actuation mechanisms to achieve vertical scans, including electrothermal [9,10], electrostatic [11,12], and piezoelectric [13].…”

Section: Introductionmentioning

confidence: 99%

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A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

2015

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This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 µm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is˘18˝at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.

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“…Although there exist various miniaturized Fourier transform spectrometers that still involve moving components [3][4][5], it would be better to have an FTS without any moving components. Currently, integrated FTS that are implemented without any moving components can be divided mainly into two categories: the stationary wave integrated FTS (SWIFTs) [6] and the spatial heterodyne spectrometer (SHS) [7].…”

Section: Introductionmentioning

confidence: 99%

CMOS-compatible broadband co-propagative stationary Fourier transform spectrometer integrated on a silicon nitride photonics platform

et al. 2017

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Abstract:We demonstrate a novel type of Fourier Transform Spectrometer (FTS) that can be realized with CMOS compatible fabrication techniques. This FTS contains no moving components and is based on the direct detection of the interferogram generated by the interference of the evanescent fields of two co-propagating waveguide modes. The theoretical analysis indicates that this type of FTS inherently has a large bandwidth (>100 nm). The first prototype that is integrated on a Si 3 N 4 waveguide platform is demonstrated and has an extremely small size (0.1 mm 2 ). We introduce the operation principle and report on the preliminary experiments. The results show a moderately high resolution (6 nm) which is in good agreement with the theoretical prediction.

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A mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface

Cited by 18 publications

References 9 publications

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

CMOS-compatible broadband co-propagative stationary Fourier transform spectrometer integrated on a silicon nitride photonics platform

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