A 3D tomographic EBSD analysis of a CVD diamond thin film

Liu, Tao; Raabe, Dierk; Zaefferer, Stefan

doi:10.1088/1468-6996/9/3/035013

Cited by 15 publications

(21 citation statements)

References 42 publications

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“…A natural question arises on the possible links between growth selection and the in-grain misorientation. At least one recent study [16] has pointed out that in-grain orientation gradients can vary, significantly, between different grains. Oblique grains, where growth was often terminated by the neighbors, Full Paper [28,29,31,[33][34][35] that both twining and impurity incorporation can have important roles in different growth sectors: and hence can affect growth velocities plus defect evolution of different crystallographic orientations.…”

Section: Discussionmentioning

confidence: 99%

“…It has gained significant importance in the studies of thin films, particularly relevant for diamond films. [12][13][14][15][16] In all such studies, X-ray texture data have been appropriately represented [17][18][19] to show preferred orientations. There have also been attempts to relate such bulk crystallographic texture with the processing and/or properties, [12][13][14] however such representations are/were qualitative at best.…”

Section: Introductionmentioning

confidence: 99%

“…electron backscattered diffraction (EBSD) is the most potent microtexture tool and it has been used successfully, in particular, for CVD diamond thin films. [16,19,20] Defects in diamond films may exist as dislocations, grain boundaries, and various other imperfections. [21][22][23][24] Typically, geometrically necessary boundaries (GNBs) and dislocations may accommodate lattice misorientations in a crystalline material.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Development of Crystallographic Texture and In‐Grain Misorientation in CVD‐Produced Single and Polycrystalline Diamond

Mohapatra

Jain

Rai

et al. 2011

Chemical Vapor Deposition

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Extensive bulk and micro-texture measurements are used to characterize single and polycrystalline diamond thin films of different film thicknesses produced using CVD. With increasing film thickness, texturing improves and in-grain misorientation drops. This is observed for both single and polycrystalline films. Improved texturing in polycrystalline diamond can be rationalized from growth selection/advantage, however explanation(s) on the in-grain misorientation development and its relationship with texturing, if any, remain pending.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Development of Crystallographic Texture and In‐Grain Misorientation in CVD‐Produced Single and Polycrystalline Diamond

Mohapatra

Jain

Rai

et al. 2011

Chemical Vapor Deposition

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“…simulated the crystallographic textures in 2D [13] and 3D [14], respectively. Concerning experimental observations, the resulting textures of different deposition environments have been investigated by many techniques, e.g., X-ray Bragg diffraction (XRD) for texture analysis in large areas [13,15], transmission electron microscopy (TEM) for defects characterization [16,17], and electron back-scattering diffraction (EBSD) for microtexture and twinning analysis [15,[18][19][20]. Among the experimental approaches, the XRD technique is good at statistical analysis in large areas but is short of characterizing local areas such as microstructure, grain boundaries, and twinning.…”

Section: Introductionmentioning

confidence: 99%

A review of crystallographic textures in chemical vapor-deposited diamond films

Liu

Raabe

Mao

2010

Front. Mater. Sci. China

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Diamond is one of the most important functional materials for film applications due to its extreme physical and mechanical properties, many of which depend on the crystallographic texture. The influence of various deposition parameters matters to the texture formation and evolution during chemical vapor deposition (CVD) of diamond films. In this overview, the texture evolutions are presented in terms of both simulations and experimental observations. The crystallographic textures in diamond are simulated based on the van der Drift growth selection mechanism. The film morphology and textures associated with the growth parameters α (proportional to the ratio of the growth rate along the〈100〉direction to that along the 〈111〉direction) are presented and determined by applying the fastest growth directions. Thick films with variations in substrate temperature, methane concentration, film thickness, and nitrogen addition were analyzed using high-resolution electron back-scattering diffraction (HR-EBSD) as well as X-ray diffraction (XRD), and the fraction variations of fiber textures with these deposition parameters were explained. In conjunction with the focused ion beam (FIB) technique for specimen preparation, the grain orientations in the beginning nucleation zones were studied using HR-EBSD (50 nm step size) in another two sets of thin films deposited with variations in methane concentration and substrate material. The microstructures, textures, and grain boundary character were characterized. Based on the combination of an FIB unit for serial sectioning and HR-EBSD, diamond growth dynamics was observed using a 3D EBSD technique, with which individual diamond grains were investigated in 3D. Microscopic defects were observed in the vicinity of the high-angle grain boundaries by using the transmission electron microscopy (TEM) technique, and the advances of TEM orientation microscopy make it possible to identify the grain orientations in nano-crystalline diamond.

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“…Some grains grow continuously through the film, while others terminate due to growth competition and twinning. 17,18 Some of the large grains have columnar or conical shapes in growth direction. Most of the large columnar crystals belong to the ͕110͖ texture fiber ͑green color, Fig.…”

mentioning

confidence: 99%

Influence of nitrogen doping on growth rate and texture evolution of chemical vapor deposition diamond films

Liu

Raabe

2009

Applied Physics Letters

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Chemical vapor deposition ͑CVD͒ diamond films were prepared using a variation in nitrogen addition into the gas source admixture by a direct current CVD method. The influence of nitrogen addition on the crystallographic texture and grain shape evolution in heteroepitaxial polycrystalline diamond films was investigated using high-resolution electron backscattering diffraction and x-ray diffraction. The analysis reveals that an addition of 1.5% N 2 to the CH 4 gas flow leads to a strong enhancement in a ͕110͖ fiber texture. The phenomenon is discussed in terms of a competitive growth selection mechanism. © 2009 American Institute of Physics. ͓DOI: 10.1063/1.3072601͔ Studies on diamond films are of high relevance as they are increasingly used as semiconductor in electronic devices such as ultraviolet light emitting diode, high-speed switches, and high-power transistors. Nitrogen-doped diamond is a n-type semiconductor while boron-doped diamond is p-type. Usually, it is more practical to synthesize n-type semiconducting chemical vapor deposition ͑CVD͒ diamond because the high boiling point of boron prevents its incorporation into diamond. Nitrogen incorporation into the deposition atmosphere has drawbacks and benefits. Concerning the disadvantages, the existence of nitrogen reduces the thermal conductivity and the optical transparency.1,2 In addition, nitrogen has a high solubility in diamond and is found to be either concentrated in small precipitates ͑type Ia͒ or dispersed on substitutional atomic sites ͑type Ib͒.3 Nitrogen addition gives diamond a yellow tarnish and increases the defect content, resulting in a negative influence on various physical properties. 4 Regarding the advantages, a small amount of nitrogen favors a ͗100͘ growth texture, 3,5 which has lower roughness, 6 higher wear resistance, and higher heat conductivity 7,8 than other crystallographic directions. Also, a limited incorporation of nitrogen seems to promote the deposition rate.9-11 Thus, it is important to understand the influence of nitrogen additions in order to take advantage of the benefits and avoid the disadvantages during diamond film synthesis. Corresponding studies have been conducted using characterization by secondary ion mass spectroscopy, 2 Raman spectroscopy, 3,4 and x-ray diffraction ͑XRD͒. 3This paper presents an investigation on the growth rate and the crystallographic texture of diamond as a function of nitrogen additions. We used a high-power direct current arc plasma jet method, operated in gas recycling mode to prepare large-scale freestanding CVD diamond films.11-13 Sets of films were deposited using variations in nitrogen addition ranging from 0.5% to 3.5% N 2 / CH 4 . The molybdenum ͑Mo͒ substrates were kept at 1050°C ͑Ϯ20 K͒ during deposition. The ratio of methane to hydrogen in the feeding flow was 1.6%. The N 2 / CH 4 ratios in the feeding flow were set to 0.5%, 1.5%, 2.5%, and 3.5%, respectively. Since the roughness of the substrate promotes nucleation, 14,15 the substrates were polished using diamond powder and ...

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A 3D tomographic EBSD analysis of a CVD diamond thin film

Cited by 15 publications

References 42 publications

Development of Crystallographic Texture and In‐Grain Misorientation in CVD‐Produced Single and Polycrystalline Diamond

Development of Crystallographic Texture and In‐Grain Misorientation in CVD‐Produced Single and Polycrystalline Diamond

A review of crystallographic textures in chemical vapor-deposited diamond films

Influence of nitrogen doping on growth rate and texture evolution of chemical vapor deposition diamond films

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