A new six-port based near-field millimeter-wave microscope using a scanning slit probe is proposed for subsurface sensing applications. The combination of a six-port reflectometer and a slit probe presents a viable and promising alternative to the costly heterodyne principle. The system presents advantages such as compactness, robustness, and low cost. To evaluate its performance, the spatial resolution is experimentally verified.Index Terms-Near-field millimeter-wave microscopy, six-port, slit probe, subsurface.