A 700-GHz MEMS Waveguide Switch

Reck, Theodore; Jung-Kubiak, Cecile; Chattopadhyay, Goutam

doi:10.1109/tthz.2016.2574304

Cited by 20 publications

(6 citation statements)

References 6 publications

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“…28 where the processor is coupled with the IF of a 500-600 GHz receiver from the "Water-Hunting Advanced Terahertz Spectrometer on an Ultra-Small Platform" (WHASTUP) space instrument [10]. Unlike most sub-millimeter spectrometers that use a flip mirror for receiver calibration, the WHATSUP instrument instead uses a microelectro mechanical system (MEMS) based waveguide switch [44] to periodically switch the receiver input to a waveguide load to calibrate absolute gain.…”

Section: Full Spectrometer Assembly and Demonstrationmentioning

confidence: 99%

CMOS System-on-Chip Spectrometer Processors for Spaceborne Microwave-to-THz Earth and Planetary Science and Radioastronomy

et al. 2022

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This article presents development of CMOS system-on-chip spectrometer processor for Spaceborne Earth Science, Planetary Science and Astronomy. The developed chip is intended for use in rotational emission spectroscopy observations from microwave to sub-millimeter wavelengths performed from Earth orbiting or deep space exploration spacecraft. The article first provides an overview of rotational spectroscopy for space sciences and highlights some of the important results achieved in Earth science, planetary science, and astronomy. The article then discusses the need for smaller and more compact spectrometer instruments across these three space science areas, which motivates this work. Then key considerations in development of spectrometer processors for space science are discussed including the significance including bandwidth, quantization efficiency and spectral channel shapes. The article then highlights detailed design of the developed spectrometer processor focusing on the many calibration techniques included to allow the chip to adapt to operations in space environments where large temperature ranges and high radiation levels are encountered. Presented measurements demonstrate the spectrometer processor operates up to 12.8 GS/s to provide up to 6.4 GHz of processing bandwidth with a frequency resolution of 8192 spectral channels and an analog resolution of 4 bits while consuming only 3960 mW of total DC power.

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Section: Full Spectrometer Assembly and Demonstrationmentioning

confidence: 99%

CMOS System-on-Chip Spectrometer Processors for Spaceborne Microwave-to-THz Earth and Planetary Science and Radioastronomy

et al. 2022

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“…Reck et al report another RWG switch that operates in 0.5-0.75 THz band [93], which can be seen in Fig. 14. Here, a large deflection MEMS actuator is used for moving an array of cantilevers, all of which are fabricated on the same silicon substrate using deep reactive ion etching.…”

Section: Reconfigurable Guided-wave Componentsmentioning

confidence: 99%

mentioning

confidence: 99%

Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability

Demir

Ünlü

2020

J. Microelectromech. Syst.

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We present an overview of the emerging and enabling miniature MEMS-based components for the terahertz frequencies. The usage of miniature MEMS integrated within the terahertz components is an uprising field of research, which offers reconfigurability, improved performance, and ability to perform unprecedented functions that cannot be achieved using the state-of-the-art semiconductor and optical technologies. In this paper, we discuss the recent progress and future of miniature MEMS-based reconfigurable components and present examples including reconfigurable sources, detectors, metamaterials, and guided-wave components.

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“…A smart design can allow for the direct mounting of highly miniaturized micromachined components between two waveguide flanges, if axial and opposite-face port arrangement is featured, as demonstrated for micromachined filters [5,6] or switches [7,8]. However, such direct connection cannot be used for devices with an off-axis port arrangement or multi-port devices if the device is smaller than the area required for the individual flanges.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Waveguide Interposer for the Characterization of Multi-port Sub-THz Devices

Gomez-Torrent

Oberhammer

2020

J Infrared Milli Terahz Waves

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This paper reports for the first time on a micromachined interposer platform for characterizing highly miniaturized multi-port sub-THz waveguide components. The reduced size of such devices does often not allow to connect them to conventional waveguide flanges. We demonstrate the micromachined interposer concept by characterizing a miniaturized, three-port, 220-330-GHz turnstile orthomode transducer. The interposer contains low-loss micromachined waveguides for routing the ports of the device under test to standard waveguide flanges and integrated micromachined matched loads for terminating the unused ports. In addition to the interposer, the measurement setup consists of a micromachined square-to-rectangular waveguide transition. These two devices enable the characterization of such a complex microwave component in four different configurations with a standard two-port measurement setup. In addition, the design of the interposer allows for independent characterization of its sub-components and, thus, for accurate de-embedding from the measured data, as demonstrated in this paper. The measurement setup can be custom-designed for each silicon micromachined device under test and co-fabricated in the same wafer due to the batch nature of this process. The solution presented here avoids the need of CNC-milled test-fixtures or waveguide pieces that deteriorate the performance of the device under test and reduce the measurement accuracy.

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A 700-GHz MEMS Waveguide Switch

Cited by 20 publications

References 6 publications

CMOS System-on-Chip Spectrometer Processors for Spaceborne Microwave-to-THz Earth and Planetary Science and Radioastronomy

CMOS System-on-Chip Spectrometer Processors for Spaceborne Microwave-to-THz Earth and Planetary Science and Radioastronomy

Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability

Micromachined Waveguide Interposer for the Characterization of Multi-port Sub-THz Devices

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