2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers.
DOI: 10.1109/vlsit.2006.1705247
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A 90nm Phase Change Memory Technology for Stand-Alone Non-Volatile Memory Applications

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Cited by 121 publications
(98 citation statements)
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“…Instead of representing information as the presence or absence of electrical charge, PCM encodes bits in different physical states of a chalcogenide material [2,3,4,10,14,18,20,23]. Through the application of different programming currents, the phase of the material can be melted and then re-solidified into either a crystalline or amorphous state, each with a distinct electrical resistance.…”
Section: Introductionmentioning
confidence: 99%
“…Instead of representing information as the presence or absence of electrical charge, PCM encodes bits in different physical states of a chalcogenide material [2,3,4,10,14,18,20,23]. Through the application of different programming currents, the phase of the material can be melted and then re-solidified into either a crystalline or amorphous state, each with a distinct electrical resistance.…”
Section: Introductionmentioning
confidence: 99%
“…1. Schematic drawings of PCRAMs, (a) Bottom contact [27], (b) Edge contact [28], (c) Wire type [29], (d) Micro-trench type [30,31].…”
Section: Pcrammentioning
confidence: 99%
“…In Fig. 1 (d), schematic drawing of Micro-trench PCRAM structure is shown [30,31]. In Micro-trench structure, bottom electrodes are made of very thin side walls of a box, thus the contact area to chalcogenide material can be made smaller than the lithography limit.…”
Section: Pcrammentioning
confidence: 99%
“…Only a portion of the GST layer, which is located close to the GST-heater interface and is referred to as active GST, undergoes phase transition when the PCM cell is thermally stimulated. In particular, in this work we focus our attention on the Lance heater geometry (Pellizzer et al, 2006), which is essentially composed of a thin layer of GST alloy and a pillar-shaped heater, as shown in Fig. 1.…”
Section: Working Principle Of the Pcm Cellmentioning
confidence: 99%