A CAD architecture for microelectromechanical systems

Maseeh, Fariborz; Harris, Regina M.; Senturia, S.D.

doi:10.1109/memsys.1990.110246

Cited by 16 publications

(2 citation statements)

References 8 publications

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“…Several worldwide projects are continuing to develop comprehensive MEMS design tools focusing on either device or system level CAD. They are derived either from existing microelectronic design tools or mechanical tools (Gilbert 1998 (Gilbert et al 1993), IntelliSuite TM , SESES (Korvink et al 1994), IntelliCAD (Maseeh 1990), MEMSCAP TM , An's MEMSCAD, Web-MEMS Designer Du 2002, 2003), etc. Figure 1 gives an overview of existing MEMS CAD and simulation tools.…”

Section: Overview Of Mems Cad and Simulation Toolsmentioning

confidence: 99%

Information and Knowledge Modeling for Computer Supported Micro Electro-Mechanical Systems Design and Development

Zha

Sriram

Gupta

2005

Volume 3: 25th Computers and Information in Engineering Conference, Parts a and B

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In this paper, we present a preliminary research effort towards an effective computer support environment for the design and development of micro-electro-mechanical systems (MEMS). We first identify the characteristics of MEMS product design and development processes and examine the state-of-the-art of MEMS CAD and simulation systems. We then propose a function-(environment-effect)-behavior-(principle-state)-form (FEEBPSF) framework based on the NIST core product model and its extensions for modeling MEMS products, and apply the OESM (open embedded system model) developed to model information and knowledge for embedded MEMS design and development. Moreover, in order to tackle the knowledgeintensive tasks of design and development for MEMS products, we develop a general and flexible knowledge repository, called KR-MEMS, based on the FEEBPSF framework and the UML/XML model, and integrate KR-MEMS into a web-based MEMS design support system. Throughout the paper, a micro fluidic dispensing device (a biomedical device for drug-delivery) is used as an example to illustrate the concepts, models, and knowledge bases necessary to support the MEMS product design and development.

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Section: Overview Of Mems Cad and Simulation Toolsmentioning

confidence: 99%

Information and Knowledge Modeling for Computer Supported Micro Electro-Mechanical Systems Design and Development

Zha

Sriram

Gupta

2005

Volume 3: 25th Computers and Information in Engineering Conference, Parts a and B

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“…Nowadays, specialized computer-aided design (CAD) software tools, such as MEMSPro TM , MEMCAD TM , INTELLISUITE TM and FEMLAB TM , perform sophisticated simulation and modelling of complex microsystems. Their use, however, requires a substantial understanding of the underlying physical behaviour and are computationally intensive since most of them are based on finite element analysis (FEA) methods [4][5][6]. In the context of this paper, tools based on these methods have successfully been used in 0960-1317/03/050580+11$30.00 © 2003 IOP Publishing Ltd Printed in the UK VC electrostatic motor modelling [7,8] whereby electrostatic forces [9], static torque [10,11] and frictional parameters [12] have been calculated from FEA simulations.…”

Section: Introductionmentioning

confidence: 99%

VHDL–AMS modelling and simulation of a planar electrostatic micromotor

Endemaño¹,

Fourniols

Camon

et al. 2003

J. Micromech. Microeng.

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System level simulation results of a planar electrostatic micromotor, based on analytical models of the static and dynamic torque behaviours, are presented. A planar variable capacitance (VC) electrostatic micromotor designed, fabricated and tested at LAAS (Toulouse) in 1995 is simulated using the high level language VHDL-AMS (VHSIC (very high speed integrated circuits) hardware description language-analog mixed signal). The analytical torque model is obtained by first calculating the overlaps and capacitances between different electrodes based on a conformal mapping transformation. Capacitance values in the order of 10 −16 F and torque values in the order of 10 −11 N m have been calculated in agreement with previous measurements and simulations from this type of motor. A dynamic model has been developed for the motor by calculating the inertia coefficient and estimating the friction-coefficient-based values calculated previously for other similar devices. Starting voltage results obtained from experimental measurement are in good agreement with our proposed simulation model. Simulation results of starting voltage values, step response, switching response and continuous operation of the micromotor, based on the dynamic model of the torque, are also presented. Four VHDL-AMS blocks were created, validated and simulated for power supply, excitation control, micromotor torque creation and micromotor dynamics. These blocks can be considered as the initial phase towards the creation of intellectual property (IP) blocks for microsystems in general and electrostatic micromotors in particular.

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Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

Zha

Mems/Nems

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Micro-Electro-Mechanical Systems (MEMS) design and manufacturing are inherently multi-physical and multi-disciplinary; no single person is able to perform a full development process for a MEM device or system. This chapter presents a web-enabled design platform for collaborative design of MEMS. The proposed web-based distributed object modeling and evaluation framework with client-knowledge server architecture, KS-DMME, allows multi-users/designers in different locations to participate in the same design process. Under this framework, concurrent integrated MEMS design and simulation models can be built using both local and distributed resources, and the design collaboration can be realized by exchanging services between modules based upon CORBA standard communication protocol. To facilitate the rapid construction of the concurrent integrated design models for MEMS, a prototype web-enabled design system, Web-MEMS Designer, is implemented through concurrent integration of multiple distributed and cooperative knowledge sources and software. By use of the developed prototype system, MEMS design and simulation can be carried out simultaneously and intelligently in an integrated but open design environment on the web. A case study of a microgripper design for micro robotic assembly systems is provided to illustrate how designers in different teams and organizations may participate and collaborate in MEMS design.

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A CAD architecture for microelectromechanical systems

Cited by 16 publications

References 8 publications

Information and Knowledge Modeling for Computer Supported Micro Electro-Mechanical Systems Design and Development

Information and Knowledge Modeling for Computer Supported Micro Electro-Mechanical Systems Design and Development

VHDL–AMS modelling and simulation of a planar electrostatic micromotor

Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

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