Information and Knowledge Modeling for Computer Supported Micro Electro-Mechanical Systems Design and Development

Abstract

In this paper, we present a preliminary research effort towards an effective computer support environment for the design and development of micro-electro-mechanical systems (MEMS). We first identify the characteristics of MEMS product design and development processes and examine the state-of-the-art of MEMS CAD and simulation systems. We then propose a function-(environment-effect)-behavior-(principle-state)-form (FEEBPSF) framework based on the NIST core product model and its extensions for modeling MEMS products, and apply the OESM (open embedded system model) developed to model information and knowledge for embedded MEMS design and development. Moreover, in order to tackle the knowledgeintensive tasks of design and development for MEMS products, we develop a general and flexible knowledge repository, called KR-MEMS, based on the FEEBPSF framework and the UML/XML model, and integrate KR-MEMS into a web-based MEMS design support system. Throughout the paper, a micro fluidic dispensing device (a biomedical device for drug-delivery) is used as an example to illustrate the concepts, models, and knowledge bases necessary to support the MEMS product design and development.

Macromodels of Micro-Electro-Mechanical Systems (MEMS)

“…TRANS126 and TRANS109 elements enable a huge reduction of the complexity of the system-level simulation. Let's consider for example the system-level macromodel of an ultrasonic transducer which has two plates with the bottom electrode area A c and the plate dimension L and which can be presented by nonlinear capacitance: (50) where C 0 is the smallest capacitance in the absent of voltage V: …”