1988
DOI: 10.1007/bf01106825
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A characterization of Kapton polyimide by X-ray photoelectron spectroscopy and energy dispersive spectroscopy

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Cited by 26 publications
(18 citation statements)
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“…1a). These particles were the slip additive to Kapton HN1418. It has been shown that the majority of the slip additive particles exuded to the surface of the substrate19, which is consistent with our observation (Fig.…”
Section: Resultssupporting
confidence: 92%
“…1a). These particles were the slip additive to Kapton HN1418. It has been shown that the majority of the slip additive particles exuded to the surface of the substrate19, which is consistent with our observation (Fig.…”
Section: Resultssupporting
confidence: 92%
“…These two types of Kapton possess the same (PMDA–ODA) chemistry and are often regarded as having the same physical and chemical properties. A difference between them, however, is that Kapton HN contains a slip additive based on dicalcium phosphate while Kapton H does not 18. Particles of this slip additive are embedded into the film.…”
Section: Introductionmentioning
confidence: 99%
“…The polymer solution is chemically imidized using the appropriate chemicals, followed by a heat treatment to remove solvent and conversion chemicals and to also complete the imidi~ation.~ Kapton HN contains a slip additive, phosphate of calcium, but Kapton H does not. 5 Patterning the dielectric is an important step in microelectronics processing as it can provide increased design and product flexibility. These patterns may be formed by mechanical means or chem-ically using plasmas or wet etchants.…”
Section: Introductionmentioning
confidence: 99%