A comparative study of surface plasmon resonance sensors by using doped-silicon grating structure on doped silicon and aluminum film

Abstract

Surface plasmon resonance (SPR) sensors using a doping silicon grating fabricated over a doping silicon film are proposed. The doping effects of n-type and p-type silicon on the performance of the sensors were calculated and discussed in detail, using a rigorous coupled-wave analysis as a numerical method. The performance parameters of the SPR sensors are defined in terms of full width half maximum (FWHM), sensitivity (S), detection accuracy (DA) and quality factor (χ). The FWHM, DA and χ are enhanced by the increase of charge carriers (N) but the sensitivity is stabled with the change of N. Furthermore, for high charge carriers N = 5 × 1020 cm−3, the effects of grating structural parameters such as grating depth and grating period on the performance is investigated. Moreover, further to increase the performance parameters a doping silicon grating is fabricated over aluminum (Al) film. Numerical results show that the Al film is responsible for enhancing the sensing performance of the proposed SPR based sensors. The present sensors can attain a maximum DA of 1.47 deg−1, S of 219.60 deg RIU−1 and χ of 322.94 RIU−1 for n-type doping silicon grating on Al film and DA of 1.78 deg−1, S of 219.40 deg RIU−1 and χ of 391.42 RIU−1 for p-type doping silicon grating on Al film.

RCWA Simulation Study of Enhanced Infrared Absorption Spectroscopy by Au Nanoparticle Array Combined with Optical Cavity Effect

“…The NPs used for this process, including research by which enhanced infrared absorption was discovered, have been used widely in evaporated films because they are easily prepared [6][7][8][9]. In recent years, many studies using nano-sized metals with special shapes such as nano-antennas and nano-resonators have been reported [10][11][12][13][14][15][16][17][18][19][20]. These structures are used to excite surface plasmons (polaritons) to create an enhanced field (called hotspots).…”

Compact silica-based equal nine-channel generated by triple-layer arrays

“…The diffraction theory or experimental fabrication of traditional gratings have been extensively studied [1][2][3][4]. By optimizing the grating profile parameters, the designed grating can be used in various fields, such as sensors [5], beam splitters [6][7][8], polarizers [9][10][11], filters [12][13][14], absorbers [15][16][17][18], and solar cells [19][20][21][22], etc.…”