2020 China Semiconductor Technology International Conference (CSTIC) 2020
DOI: 10.1109/cstic49141.2020.9282491
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A Device Design for 5 nm Logic FinFET Technology

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Cited by 5 publications
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“…The threshold voltage decreases with the reduction of channel length, but the opposite is observed for the subthreshold slope (SS) because the FinFET with 5 nm node technology is more immune to short Channel Effect (SCE) [6][19]. We note that the result obtain in this simulation for the performance ratio ION/IOFF is higher than that calculated by Yu Ding et al [5] and the result of threshold voltage obtained is better than that calculated by Vinay Vashishtha [4].…”
Section: Fig 5 Transfer Characteristics Of N Finfet 5nmmentioning
confidence: 54%
“…The threshold voltage decreases with the reduction of channel length, but the opposite is observed for the subthreshold slope (SS) because the FinFET with 5 nm node technology is more immune to short Channel Effect (SCE) [6][19]. We note that the result obtain in this simulation for the performance ratio ION/IOFF is higher than that calculated by Yu Ding et al [5] and the result of threshold voltage obtained is better than that calculated by Vinay Vashishtha [4].…”
Section: Fig 5 Transfer Characteristics Of N Finfet 5nmmentioning
confidence: 54%
“…As an alternative to planar metal-oxide-semiconductor field-effect transistors (MOSFETs), fin field-effect transistors (FinFETs), which utilize a three-dimensional architecture with the gate wrapping around vertical fins on top and sides, have been developed and commercialized in 22 nm CMOS technology [1][2][3]. During the past decades, FinFET technology has been successfully applied to 5 nm and even 3 nm technology nodes through higher aspect ratio and layout optimization [4][5][6][7][8]. However, the scaling of Fin-FETs has also encountered fabrication-and performance-related obstacles due to fundamental physical limitations and difficulties in developing the required process.…”
Section: Introductionmentioning
confidence: 99%