A face-shear mode single crystal ultrasonic motor

Abstract

We report a face-shear mode ultrasonic motor (USM) made of [011]c poled Zt ± 45° cut 0.24Pb(In1/2Nb1/2)O3-0.46Pb(Mg1/3Nb2/3)O3-0.30PbTiO3 single crystal, which takes advantage of the extremely large d36 = 2368 pC/N. This motor has a maximum no-load linear velocity of 182.5 mm/s and a maximum output force of 1.03 N under the drive of Vp = 50 V, f = 72 kHz. Compared with the k31 mode USM made of Pb(Zr,Ti)O3 (PZT), our USM has simpler structure, lower driving frequency, much higher electromechanical coupling factor, and twice power density. This USM can be used for low frequency operation as well as cryogenic actuation with a large torque.

High-order face-shear modes of relaxor-PbTiO3 crystals for piezoelectric motor applications

“…[8][9][10][11] Extensive attention has been given to relaxor-PT crystals, such as Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 (PMNT), because of their superior piezoelectric characteristics over conventional Pb(Zr,Ti)O 3 (PZT) ceramics. [12][13][14][15][16][17] Especially, at cryogenic temperature, piezoelectric constants of piezoelectric single crystals are still superior to those of PZT ceramics at room temperature, although they also diminish as temperature decreases. [18][19][20] The [011] poled Zt 6 45 cut relaxor-PT crystal exhibits large face shear piezoelectric constant d 36 (1600 $ 2800 pC/N) and high electromechanical coupling factors (0.77 $ 0.83).…”

“…13 A resonator operating in d 36 face shear mode also has a higher mechanical quality factor Q m (100 $ 450) than that operating in d 15 or d 24 thickness shear mode. 13,14 In addition, the working electric field direction of a d 36 face-shear resonator is the same as its poling direction, which can avoid the depolarization problem as occurred in d 15 or d 24 thickness-shear resonators. 13,14 It is well known that a piezoelectric body in electromechanical resonance (EMR) can realize the maximum electric-to-mechanical energy conversion.…”

“…13,14 In addition, the working electric field direction of a d 36 face-shear resonator is the same as its poling direction, which can avoid the depolarization problem as occurred in d 15 or d 24 thickness-shear resonators. 13,14 It is well known that a piezoelectric body in electromechanical resonance (EMR) can realize the maximum electric-to-mechanical energy conversion. [21][22][23] For example, an ultrasonic motor (USM) is to use EMR effect for producing precise motion.…”

Analysis on the anisotropic electromechanical properties of lead magnoniobate titanate single crystal for ring type ultrasonic motors

“…15,16 The same orientation was reported as the optimal direction for a face-shear mode PIN-PMN-PT single crystal USM, where a maximum no-load linear velocity of 182.5mm/s and a maximum output force of 1.03N were observed. 17 Up to now, the anisotropic analysis for the PMNT single crystal ring concerning amplitude uniformity on the stator of traveling wave motors, has not been reported yet.…”

Characterization of full set material constants of piezoelectric materials based on ultrasonic method and inverse impedance spectroscopy using only one sample

“…[1][2][3][4][5][6][7][8][9][10][11][12] In modern device design, finite element software packages are routinely used, which need to have the complete set of material properties of constituent materials as input. The accuracy of these material constants determines the accuracy of the design simulation.…”