A Fiber-Si<sub>3</sub>N<sub>4</sub> Composite Nanoforest with High 7.6 to $11.6\ \mu\mathrm{m}$ Absorption for MEMS Infrared Sensors

Zhang, Chenchen; Mao, Haiyang; Shi, Meng; Xiong, Jijun; Long, Kewen; Chen, Dapeng

doi:10.1109/mems46641.2020.9056198

Cited by 4 publications

(2 citation statements)

References 11 publications

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“…一些热电堆器件使用氮化硅作为吸收材料 [26,27] , 但氮化硅的吸收率相对于VG而言在较低水平. 在之前的报道中, 黑色金属、黑色纳米材料、黑硅 [28,29] 从而可以提升VG的质量 [30] .…”

Section: 热电堆红外探测器基于塞贝克效应可以实现unclassified

Metal thermopile infrared detector with vertical graphene

Li¹,

Dong²,

Du³

et al. 2023

Acta Phys. Sin.

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Thermopile infrared detector is a kind of detector device mainly composed of thermocouple as the basic unit. Because of its simple principle, it does not require cooling equipment and other unique advantages have been widely applied in various aspects of production and life. However, the absorption rate of the materials in conventional thermopile devices is poor, and the majority of them are incompatible with microfabrication methods. In this paper, a metal thermopile infrared detector with Vertical Graphene (VG) is designed and fabricated. The VG is grown via Plasma Enhanced Chemical Vapor Deposition (PECVD), VG is retained at the device's thermal ends to provide the thermopile IR detector's wideband and high response characteristics. The detector achieves a room temperature responsivity of high to 1.53 V/W at 792 nm, which can increase the response results about 28 times and reduce the response time to 0.8 ms compared to the thermopile detector without VG. After systematically measuring the response results, it was finally found that there are three main mechanisms for the response on the composite device, the first one is the response generated by the metal thermopile itself alone, the second one is the response increase eventually contributed by the VG covered at the metal thermal junction that expands the temperature difference. The last one is the response generated by the temperature gradient existing inside the VG on the surface of the device after the absorption of heat. The share of each partial response mechanism in the total response is also analyzed together. It provides a new reference direction for analyzing the response generation mechanism of thermopile detectors with other absorbing materials. The process is compatible with the microfabrication, while the device performance is enhanced and suitable for mass production. Furthermore, utilizing Surface Plasmon Resonance (SPR) to combine VG with metal nanoparticles, it is discovered that the material's light absorption is significantly enhanced under the same conditions, and the resulting thermal voltage can be increased to 6 times. The results indicate that VG has a great promise for practical applications, such as photoelectric sensing and power production devices. This technology provides a new method for fabricating high-performance thermopile infrared detectors and other sensor devices.

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Section: 热电堆红外探测器基于塞贝克效应可以实现unclassified

Metal thermopile infrared detector with vertical graphene

Li¹,

Dong²,

Du³

et al. 2023

Acta Phys. Sin.

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“…The microbridge-based thermopile device can achieve a 13.8% increase in output voltage compared with a thermopile device using a continuous film [4]. Zhang et al [5,6] designed a MEMS thermopile infrared detector with a high absorption-thermal conductivity film structure. The design of the thermal conductivity structure introduced low thermally conductive insulating silicon nitride material into the hot end, reducing the intermediate process of heat transfer and improving the performance, while further improving the detector performance by 20% by integrating a nano-forest structure.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure

et al. 2023

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The micro-electromechanical system (MEMS) infrared thermopile is the core working device of modern information detection systems such as spectrometers, gas sensors, and remote temperature sensors. We presented two different structures of MEMS infrared thermopiles based on suspended film structures. They both deposited silicon nitride over the entire surface as a passivated absorber layer in place of a separate absorber zone, and the thermocouple strip was oriented in the same direction as the temperature gradient. The same MEMS preparation process was used and finally two different structures of the thermopile were characterized separately for testing to verify the impact of our design on the detector. The test results show that the circular and double-ended symmetrical thermopile detectors have responsivities of 27.932 V/W and 23.205 V/W, specific detectivities of 12.1×107 cm·Hz1/2·W−1 and 10.1×107 cm·Hz1/2·W−1, and response time of 26.2 ms and 27.06 ms, respectively. In addition, rectangular double-ended symmetric thermopile has a larger field of view than a circular thermopile detector, but is not as mechanically stable as a circular thermopile.

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A Gesture Recognition Glove Assembled with Nanoforest-Integrated Infrared Thermopiles

Shi

Chen

et al. 2023

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

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A Fiber-Si₃N₄ Composite Nanoforest with High 7.6 to $11.6\ \mu\mathrm{m}$ Absorption for MEMS Infrared Sensors

Cited by 4 publications

References 11 publications

Metal thermopile infrared detector with vertical graphene

Metal thermopile infrared detector with vertical graphene

Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure

A Gesture Recognition Glove Assembled with Nanoforest-Integrated Infrared Thermopiles

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A Fiber-Si3N4 Composite Nanoforest with High 7.6 to $11.6\ \mu\mathrm{m}$ Absorption for MEMS Infrared Sensors

Cited by 4 publications

References 11 publications

Metal thermopile infrared detector with vertical graphene

Metal thermopile infrared detector with vertical graphene

Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure

A Gesture Recognition Glove Assembled with Nanoforest-Integrated Infrared Thermopiles

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Product

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A Fiber-Si₃N₄ Composite Nanoforest with High 7.6 to $11.6\ \mu\mathrm{m}$ Absorption for MEMS Infrared Sensors