61st Device Research Conference. Conference Digest (Cat. No.03TH8663)
DOI: 10.1109/drc.2003.1226864
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A Fin-type independent-double-gate NFET

Abstract: We present, to ow knowledge, the first published experimental integration of two independent gates on a FinFET. The devices have symmetric gate oxide physical thicknesses of 8.5nm, gate lengths ranging from 0.25p-1 to Spm, and designed fin thicknesses ranging from lOnm to 1OOnm. Independent-gate operation is demonstrated by modulating saturated drain current with both front and back gate voltages. IntroductionRecently, the double-gate FET has become a popular device candidate for future generations of CMOS tec… Show more

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Cited by 23 publications
(15 citation statements)
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“…Typically the front and back gates of DG devices are connected together resulting in a 3-Terminal (3-T) device. 3-T devices can be used Recently, double gate devices with independent gate control option (separate contacts for back and front gates) have been developed [9][10]. Such DG devices are referred to as Independent or Isolated Gate (IG) devices (Fig.…”
Section: Double Gate Soi Devicesmentioning
confidence: 99%
See 2 more Smart Citations
“…Typically the front and back gates of DG devices are connected together resulting in a 3-Terminal (3-T) device. 3-T devices can be used Recently, double gate devices with independent gate control option (separate contacts for back and front gates) have been developed [9][10]. Such DG devices are referred to as Independent or Isolated Gate (IG) devices (Fig.…”
Section: Double Gate Soi Devicesmentioning
confidence: 99%
“…bulk-CMOS) can be directly translated to DG technology by replacing each transistor with a connected gate (3-T) DGMOS, where the front and the back gates are tied together. However, the directly translated circuit style does not utilize possibility of independent control of front and back gates (4-T configuration) [9][10]. The fabrication of both 3-T and 4-T DG on the same process has been recently reported [10].…”
Section: Logic Design Using Double Gate Devicesmentioning
confidence: 99%
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“…This is because: Fig. 3 [6][7]. This analysis represents the current difference between two identical transistors, both with front gate at V DD but with different back gate bias.…”
Section: Device Characteristicsmentioning
confidence: 99%
“…bulk-CMOS) can be directly translated into the DG technology by replacing each transistor with a connected gate DGMOS (ConnGateDG), where the front and the back gates are tied together. However, the Directly Translated circuit (DirTrans) style does not utilize possibility of independent control (IndGateDG) of front and back gates [6][7]. The fabrication of both ConnGateDG and IndGateDG on the same process has been recently reported [7].…”
Section: Introductionmentioning
confidence: 99%