A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet

Dynamic Modeling and Attitude Decoupling Control for a 3-DOF Flexible Piezoelectric Nano-Positioning Stage Based on ADRC

“…Meanwhile, a two-axis optical scanner constructed from a stainless-steel substrate and piezoelectric thin-sheet actuators is proposed and fabricated as an alternative with a large mirror size and scanning angle [ 16 ]. After this, an ultrathin nano-positioning platform constructed from a piezoelectric thin sheet by an ultrasonic milling process was designed and applied to atomic force microscopy [ 17 , 18 ]. In addition, a hybrid sensitivity controller is proposed to suppress the tilt of the micro-mirror in both directions of motion, to maintain the pure translational motion, and to eliminate external interference and internal structure deterioration [ 19 ].…”

Dynamic modeling and validation of a novel 3-DOF flexible thin sheet nano-manipulator with piezoelectric material bonded

“…A two-axis scanner composed of a bulk-type PZT actuator and a silicon-based MEMS scanning mirror has also been proposed, in it, a novel laser projection module integrated with such a device can receive videos and project images [18]. Meanwhile, a novel monolithic nano-positioning stage constructed from a unimorph or bimorph piezoelectric sheet by ultrasonic machining has been proposed to meet the demand of ultra-compact applications effectively [19,20], which exhibits the advantages of multidegrees-of-freedom, high bandwidth, and ultra-compact size. Although the static modeling method has been discussed for the above systems such as [21], the dynamical model for the flexible piezoelectric micro-actuated systems has general difficulties due to the existence of distributed parameter properties and the piezoelectric-mechanical coupling effect factors that prevent the deployment of the model-based control of such systems and therefore limits their performance in nano-scale applications.…”