A Force Rebalanced Micro-Gyroscope Driven by Voltages Oscillating at Half of Structure’s Resonant Frequency

Ding, Xu Chu; Li, Hongsheng; Zhu, Kaizheng; Zhang, Ying

doi:10.1109/jsen.2016.2618372

Cited by 13 publications

(11 citation statements)

References 28 publications

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“…If the third part is used for control, the input frequency ω d = 1 2 ω 0 . Either way can be chosen, but the difference in amplitude and phase should be noted [45].…”

Section: Electrostatic Force and Electrostatic Negative Stiffness Effectmentioning

confidence: 99%

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

et al. 2020

Self Cite

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An automatic mode-matching method for MEMS (Micro-electromechanical Systems) disk resonator gyroscopes (DRGs) based on virtual Coriolis force is presented in this paper. For this mode-matching method, the additional tuning electrodes are not required to be designed, which simplifies the structure design. By using the quadratic relationship between the driving voltage and the electrostatic force, the virtual Coriolis force is obtained by applying an AC voltage whose frequency is half of the driving mode resonant frequency to the sense electrode. The phase difference between the virtual Coriolis force and the sense output signal is used for mode-matching. The structural characteristics and electrode distribution of the DRG are briefly introduced. Moreover, the mode-matching theories of the DRG are studied in detail. The scheme of the mode-matching control system is proposed. Simultaneously, the feasibility and effectiveness of the mode-matching method are verified by system simulation. The experimental results show that under the control of mode-matching at room temperature, the bias instability is reduced from 30.7575 • /h to 2.8331 • /h, and the Angle Random Walk (ARW) decreases from 1.0208 • / √ h to 0.0524 • / √ h. Compared with the mode mismatch condition, the ARW is improved by 19.48 times.Micromachines 2020, 11, 210 2 of 22 Therefore, the mode-matching technology improves the bias stability and mechanical sensitivity of MEMS gyroscopes by eliminating the frequency split between the driving mode and the sensing mode, which has attracted significant attention from researchers [19][20][21]. Furthermore, some frequency modification techniques are proposed. Laser finishing, ion beam milling, and selective deposition mass loading reduce frequency split [22,23]. However, these methods are often used to change the dynamic characteristics of the sensor permanently, and this type of tuning is inflexible and time-consuming. The tuning control is limited and can only be achieved offline.Electrostatic tuning is usually used for mode-matching, which can provide more flexibility and real-time realization [24][25][26][27][28][29]. The mode-matching process based on phase-locked loop (PLL) takes advantage of the phase delay of 90 • between the quadrature input and output of the sensing mode. This feature is used in [27] to achieve mode-matching and to adjust the tuning voltage using PLL technology. The amplitude-frequency characteristic refers to the maximum amplitude of the quadrature response signal during mode-matching [28]. However, in these methods, the signal from the Coriolis demodulation channel is used to control the frequency tuning voltage. Therefore, the angular velocity can only be measured if the tuning voltage is fixed, and the matching loop is disconnected after mode-matching. Thus, these methods cannot achieve real-time mode-matching. However, in practical applications, the frequency split of the vibratory mode changes with changes in environmental parameters [29]. Therefore, such one-time matching methods a...

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“…If the third part is used for control, the input frequency ω d = 1 2 ω 0 . Either way can be chosen, but the difference in amplitude and phase should be noted [45].…”

Section: Electrostatic Force and Electrostatic Negative Stiffness Effectmentioning

confidence: 99%

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

et al. 2020

Self Cite

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“…Two resonators in the same axial direction are forced in the opposite direction, which results in the opposite change of natural frequency. As illustrated, the resonator frequency difference Δ ω n is proportional to the applied axial force, which means the frequency difference of two resonators is proportional to the square of the input air flow velocity [ 25 , 26 , 27 ]. The input–output relationship between the air flow velocity and frequency difference, namely the sensitivity of the proposed sensor, can be expressed as Formula (7).…”

Section: Device Descriptionmentioning

confidence: 99%

Design and Characterization of a Novel Biaxial Bionic Hair Flow Sensor Based on Resonant Sensing

Liang

Guo

Yang

et al. 2020

Sensors

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This paper presents the design, theoretical analysis, simulation verification, fabrication and prototype characterization of a novel biaxial bionic hair flow sensor based on resonant sensing. Firstly, the device architecture, mainly consists of a polymer hair post, a silicon micro signal transducer and a glass substrate, is described, the theoretical simplified model is established and the mechanical sensitivity to air flow is deducted. Then, the structure simulations based on Ansys software are implemented to preliminarily verify the feasibility of the proposed sensor conception and optimize the structure parameters simultaneously. Subsequently, a closed-loop control scheme based on digital phase-locked loop and an amplitude demodulation algorithm of oscillatory flow velocity based on the least mean square method are proposed to transform and extract the air flow signal, and then verify it by circuit simulations based on SIMULINK. Finally, the fabricated prototype is illustrated and comprehensively tested. The tested prototype possesses an x-axis scale factor of 1.56 Hz/(m/s)2 and a y-axis scale factor of 1.81 Hz/(m/s)2 for the steady air flow and an x-axis detection threshold of 43.27 mm/s and a y-axis detection threshold of 41.85 mm/s for the oscillatory air flow.

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“…Because of the electrical feed-through between silicon structural electrodes, the feedback excitation signal and noise will be fed directly to the detection output [13,14]. At present, the methods used to suppress the feed-through include electromechanical amplitude modulation (EAM) technology [15,16], non-resonant frequency drive technology [14] and parameter excitation [17], etc.…”

Section: Introductionmentioning

confidence: 99%

Noise model considering electrical feed-through under force rebalance closed-loop detection of MEMS gyroscope

Wang

Fan

et al. 2020

J. Micromech. Microeng.

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This study analyses the transfer path of electrical feed-through noise in the electromechanical amplitude modulation detection circuit of a micro-electro-mechanical system vibrating gyroscope. By considering the feed-through, circuit and mechanical thermal noises, a new noise model in the force-to-rebalance closed-loop detection is constructed, and the expression of the noise-equivalent rotation rate spectrum is given. In addition, the influences of factors such as circuit gain, feedback coefficient and frequency split on the contribution of noise are analysed. The analysis shows that the back-end injection noise is the main factor affecting angle random walk (ARW) for high Q-value gyroscopes. Through actual measurements, it was found that the feed-through noise at the carrier frequency of the feedback circuit was the main source of the back-end noise. After noise optimization, the ARW of the detection output decreased from 0.148 ° / hr to 0.017 ° / hr , which was an improvement of about 8.7 times.

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A Force Rebalanced Micro-Gyroscope Driven by Voltages Oscillating at Half of Structure’s Resonant Frequency

Cited by 13 publications

References 28 publications

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

Design and Characterization of a Novel Biaxial Bionic Hair Flow Sensor Based on Resonant Sensing

Noise model considering electrical feed-through under force rebalance closed-loop detection of MEMS gyroscope

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