A geometric procedure for improved Rutherford backscattering channeling analysis of materials

Wijesundera, D.; Ma, K.B.; Wang, Xuemei; Liu, Biao; Liu, Jiarui; Chu, W. K.

doi:10.1016/j.nimb.2009.03.104

Cited by 5 publications

(3 citation statements)

References 1 publication

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“…For 2D channeling patterns to be obtained by using this experimental approach, the ingoing beam angle is generally varied in equidistant x-and y-steps (θ and ω angles) around the channeling direction, a procedure which unfortunately has been given various names in the literature, e.g. "image scan" [4][5][6], "angular resolved channeling image" [7], "three-dimensional visualization of ion channeling " [8], "two-dimensional channeling pattern" [9], "angular scan image" [10], "angular yield maps" [11], "angular dependent ion channeling" [12], "angle-resolved scan" [13], "full scan maps" [14], "RBS-C maps" [15], "channeling crystal image" [16], "channeling image" [17], "angular resolved RBS data" [18], "2D ion channeling image" [19], "channeling/blocking pattern" [20], and "angular scan mapping" [21]. While such type of 2D scans are used by numerous groups, e.g.…”

Section: Motivation: the Use Of Two-dimensional Patterns In Channeling Measurementsmentioning

confidence: 99%

A generalized fitting tool for analysis of two-dimensional channeling patterns

David-Bosne

Wahl

Correia

et al. 2020

Nuclear Instruments and Methods in Physics Research Section B:

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The acquisition of two-dimensional (2D) channeling patterns is gaining increased popularity within the ion beam community. However, with the exception of emission channeling experiments for the lattice location of radioactive impurities, quantitative analysis of such patterns is rarely found. We present a general description of the statistical data analysis methodology for 2D channeling patterns, which consists of comparing experimental data by means of a fit procedure to theoretical yield distributions. The developed software allows for chi-square or maximum likelihood-based fits, optimizing the orientation of the theoretical vs the experimental pattern, as well as the best choice of random level, and providing fractions for the contributions from several theoretical patterns related to different lattice sites. Optionally also the angular resolution can be used as a fit parameter. Use of the software is illustrated by examples of electron emission channeling from 27 Mg in GaN, as well as 4 He RBS channeling from Ge.

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Section: Motivation: the Use Of Two-dimensional Patterns In Channeling Measurementsmentioning

confidence: 99%

A generalized fitting tool for analysis of two-dimensional channeling patterns

David-Bosne

Wahl

Correia

et al. 2020

Nuclear Instruments and Methods in Physics Research Section B:

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“…For example, in the case of 4 He+ primary beam in energy ranges from hundreds of keV to several MeV, the sample surface layer of up to 1 µm can be 2 of 17 analyzed. The ions penetrate deeply into the crystal without substantially perturbing the lattice [1][2][3][4].…”

Section: Introductionmentioning

confidence: 99%

RBS Channeling MATLAB Application for Automated Measurement Control and Evaluation for 6MV Tandetron Accelerator

et al. 2021

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Rutherford backscattering spectrometry (RBS) in channeling regimes (RBS/C), as an ion beam analysis method performed on a Tandetron 6MV accelerator, generally gives precise information about the structure of crystalline samples by combining RBS signals in the random and aligned configurations. This paper presents details about the design and implementation of tailored RBS/C measurements (coarse and fine) and data evaluation application developed in MATLAB for in situ accelerator control system ARGUS, delivered by High Voltage Engineering Europa BV (HVEE). Additionally, we examined two different ways of stepping during the measurement to reduce the possible inaccuracies related with goniometer’s backslash affecting the evaluation of spectra. Verification experiment was carried out using a 2-MeV 4He+-beam directed on a Si (100) substrate. The channeling effect is seen as channeling dips of a lower signal in an otherwise rather homogeneous plane. Implemented application significantly facilitates the RBS/C measurement and analysis of the experiments, and also extends the ion beam analysis portfolio of Advanced Technologies Research Institute. Finally, software is ready-to-use for any Tandetron based ion beam facility with the ARGUS software for accelerator control.

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“…The details of the goniometer were described in the literature. [5,18,19] A Si:Au surface barrier detector (resolution: 15 keV for H + , detection area: 25𝜋 mm 2 , distance from the sample: 50 mm) equipped with a charge sensitive pre-amplifier, a spectroscopic amplifier, an ion beam current integrator, a single channel analyzer and a PC installed with a multichannel analyzer (MCA) were used for the measurement. The major components are listed in Table 1.…”

mentioning

confidence: 99%

Computerized Control and Operation of Rutherford Backscattering/Channeling for an in situ Ion Beam System and Its Application for Measurement of Si(001) and ZnO(001)

Lee

et al. 2011

Chinese Phys. Lett.

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A computer-automated Rutherford backscattering/channeling (RBS/C) system is developed to provide in situ ion beam analysis of the accelerator-TEM system in Wuhan University. The basic system components are a PC equipped with a multichannel analyzer data acquisition board, motion control hardware including the Panmure stepping motor controller and integrated circuit modules, and a Labview programmed operating system with associated electronics. Single crystalline Si(001) and ZnO(001) implanted with Mn ions were characterized with this computerized setup. The crystalline quality 𝜒min and channeling half angle of Si(001) were measured to be 4.65% and 0.52 ∘ , respectively, which are comparable to theoretical values 4.2% and 0.32 ∘ . The ion implantation induced damage depth profile derived from channeling and random spectrum is in reasonable agreement with the result calculated by the SRIM Monte-Carlo simulation code.

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A geometric procedure for improved Rutherford backscattering channeling analysis of materials

Cited by 5 publications

References 1 publication

A generalized fitting tool for analysis of two-dimensional channeling patterns

A generalized fitting tool for analysis of two-dimensional channeling patterns

RBS Channeling MATLAB Application for Automated Measurement Control and Evaluation for 6MV Tandetron Accelerator

Computerized Control and Operation of Rutherford Backscattering/Channeling for an in situ Ion Beam System and Its Application for Measurement of Si(001) and ZnO(001)

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