Computerized Control and Operation of Rutherford Backscattering/Channeling for an
                    <i>in situ</i>
                    Ion Beam System and Its Application for Measurement of Si(001) and ZnO(001)

He, Jun; Lee, J. C.; Li, Ming; Wang, Ze-Song; Liu, Chuansheng; Fu, Dejun

doi:10.1088/0256-307x/28/1/012901

Cited by 3 publications

(5 citation statements)

References 16 publications

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“…Small divergences were collimated to the spot size of 1.5 mm. Our current experimental setup (Figure 1) is described in detail [8].…”

Section: Accelerator and Ion Beam Analysismentioning

confidence: 99%

“…Small divergences were collimated to the spot size of 1.5 mm. Our current experimental setup (Figure 1) is described in detail [8]. The Ion accelerator is operated by real-time TwinCAT SoftPLC interlinked with HVEE control software, ARGUS.…”

Section: Accelerator and Ion Beam Analysismentioning

confidence: 99%

“…During the RBS measurement, the backscattered ions were detected by a silicon detector with an energy resolution of 13 keV situated at a fixed position and at a scattering angle of 170 • [8]. Insulation of the sample holder against the main body of the goniometer allows in-situ measurement of the actual ion beam current which measured 8-10 nA.…”

Section: Rbs/c Measurement Proceduresmentioning

confidence: 99%

“…Hence, the process automatization is required in order to increase the efficiency of RBS/C measurement. In fact, because of the different experimental setups, control systems, other software, options, and etc., the ion beam facilities are developing their own tailor-made applications and software tools including RBS/C to support the competences in ion beam analysis (IBA) [8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

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RBS Channeling MATLAB Application for Automated Measurement Control and Evaluation for 6MV Tandetron Accelerator

et al. 2021

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Rutherford backscattering spectrometry (RBS) in channeling regimes (RBS/C), as an ion beam analysis method performed on a Tandetron 6MV accelerator, generally gives precise information about the structure of crystalline samples by combining RBS signals in the random and aligned configurations. This paper presents details about the design and implementation of tailored RBS/C measurements (coarse and fine) and data evaluation application developed in MATLAB for in situ accelerator control system ARGUS, delivered by High Voltage Engineering Europa BV (HVEE). Additionally, we examined two different ways of stepping during the measurement to reduce the possible inaccuracies related with goniometer’s backslash affecting the evaluation of spectra. Verification experiment was carried out using a 2-MeV 4He+-beam directed on a Si (100) substrate. The channeling effect is seen as channeling dips of a lower signal in an otherwise rather homogeneous plane. Implemented application significantly facilitates the RBS/C measurement and analysis of the experiments, and also extends the ion beam analysis portfolio of Advanced Technologies Research Institute. Finally, software is ready-to-use for any Tandetron based ion beam facility with the ARGUS software for accelerator control.

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“…Small divergences were collimated to the spot size of 1.5 mm. Our current experimental setup (Figure 1) is described in detail [8].…”

Section: Accelerator and Ion Beam Analysismentioning

confidence: 99%

Section: Accelerator and Ion Beam Analysismentioning

confidence: 99%

Section: Rbs/c Measurement Proceduresmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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RBS Channeling MATLAB Application for Automated Measurement Control and Evaluation for 6MV Tandetron Accelerator

et al. 2021

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“…With the virtual instrument automation, we are able to reduce the experimental duration and get the RBS spectra, resulting in an increased experimental throughput of the accelerator. The automation had added advantages over other similar works [21,22] in versatility, availability of Hi-RBS automation and its detailed description, multiple sample ion implantation, easy reconfiguration and amenability to add other ion beam analysis experiments. The full automation software consists of standalone executable virtual instruments which provide user interactive graphical interfaces.…”

Section: Development Of Virtual Instruments For Automated Ion Implant...mentioning

confidence: 99%

Development of PC based automation of ion beam analysis and ion implantation experiments

et al. 2020

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A: This paper presents the details of a personal computer (PC) based automation of ion beam analysis and ion implantation experimental setup that has been developed and implemented in a 1.7 MV Tandetron accelerator. Hardware and software of the PC automated system were designed to automate multiple sample ion implantation, standard Rutherford Backscattering spectrometry (RBS), and High resolution Rutherford Backscattering spectrometry (Hi-RBS) experiments. The system uses in-house developed signal conditioning circuitry, isolation amplifiers, and transistor drivers along with cost-effective and off-the-shelf commercial components like a general purpose, multifunction data acquisition card, etc. A five axis goniometer is used for handling multiple samples and their automatic positioning according to the commands from the PC over RS232 interface. Key tasks carried out in the automation of system include control and mesurement of ion beam fluence, selection of backscattered particles through screening of their energies by controlling a set of +/−25 kV and −3 kV high voltage power supplies, controlled collection of backscattered yield using single and multi channel analysers, controlling the region-of-interest windows in the energy spectra and the cumulative counts in them. Controlling the position of the samples and facilitating the experiments on multiple samples, online display of energy spectra and its auto storage, and vacuum interlocking are also automatically done. This PC based setup has been automated using a windows based LabVIEW software making it easy to port the set up between different computer operating systems apart from achieving many other advantages like quick and easy development of versatile, multi-purpose, and user friendly graphical interface. Extensive tests carried out on the hardware established correct functioning of various modules of the hardware. The 0-10 V control inputs applied to the +/−25 kV and −3 kV high voltage power supplies were tested and seen providing an <0.1% accuracy, <0.05% linearity, very low drift of 50 ppm, 0.01% precision, and <1mv rms output noise. The software modules have been tested to check independent control and monitoring the irradiated dose, energy to voltage conversion, the multi channel analyser 1Corresponding author.

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Design of an automated particle detection system for Rutherford backscattering (RBS) using LabVIEW

Christenson

2018

Instrumentation Science & Technology

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Computerized Control and Operation of Rutherford Backscattering/Channeling for an in situ Ion Beam System and Its Application for Measurement of Si(001) and ZnO(001)

Cited by 3 publications

References 16 publications

RBS Channeling MATLAB Application for Automated Measurement Control and Evaluation for 6MV Tandetron Accelerator

RBS Channeling MATLAB Application for Automated Measurement Control and Evaluation for 6MV Tandetron Accelerator

Development of PC based automation of ion beam analysis and ion implantation experiments

Design of an automated particle detection system for Rutherford backscattering (RBS) using LabVIEW

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