A gyroscope array with linked-beam structure

Kim, Seokyu; Lee, Byeungleul; Lee, Joonyeop; Chun, Kukjin

doi:10.1109/memsys.2001.906471

Cited by 3 publications

(1 citation statement)

References 6 publications

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“…MEMS gyroscopes are required to have a high performance. Many fabrication techniques, concepts and designs have been examined in order to improve the performance [1][2][3][4][5]. In addition, various tuning or control techniques have been reported [6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes

Jeong¹,

Seok²,

Lee³

et al. 2004

J. Micromech. Microeng.

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A new approach for improving the performance of MEMS vibratory gyroscopes was developed. The methodology suggests a simple way of improving the performance such as the overshoot, settling time and shock immunity by tuning the resonant frequency and the quality factor. The difference in the resonant frequency in two modes (driving and sensing mode) and the quality factors were found to be key factors in determining the dynamics of the gyroscopes. The difference in the frequency could be easily controlled by the electrical stiffness but it was difficult to control the quality factor because it is determined by vacuum level and the shape of structure. An electrostatic feedback technique allowed the control of the quality factor of the micro-gyroscopes. The experimental results show that the magnitude of the resonant peak in the frequency response of the gyroscope is reduced by 58% when the equivalent quality factor of the sensing system is tuned from 264 to 100 at a 100 Hz frequency difference between the driving and sensing modes. The time domain estimation was an approximate 50% reduction in the overshoot and an approximate threefold shortening of the settling time in that case. The estimation in the time domain was based on the simulation because there is no method to measure the transient response of gyroscopes directly.

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