A hard X-ray nanoprobe beamline for nanoscale microscopy

Winarski, R.; Holt, Martin V.; Rose, Volker; Fuesz, Peter; Carbaugh, Dean; Benson, C.; Shu, Deming; Kline, David; Stephenson, G. B.; McNulty, Ian; Mäser, J.

doi:10.1107/s0909049512036783

Cited by 172 publications

(120 citation statements)

References 29 publications

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“…Data collection: The coherent diffraction measurements were done at the Hard X-ray Nanoprobe beamline [39][40][41]. A Fresnel zone plate was used to focus 9 keV energy x-rays with wavelength λ = 0.137 nm to a ∼40 nm diameter focal spot (FWHM intensity of the central focus peak).…”

Section: Methodsmentioning

confidence: 99%

“…The geometry and mechanical boundary conditions of these epitaxial device components are such that strain gradients are expected to build up near the vertical interface between the eSiGe and SOI channel regions. The device SOI/eSiGE architecture shown in Figure 3(a) repeats for > 100 periods in the x direction, and is invariant and self-similar in the y direction for tens of microns.Data collection: The coherent diffraction measurements were done at the Hard X-ray Nanoprobe beamline [39][40][41]. A Fresnel zone plate was used to focus 9 keV energy x-rays with wavelength λ = 0.137 nm to a ∼40 nm diameter focal spot (FWHM intensity of the central focus peak).…”

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confidence: 99%

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High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

et al. 2016

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We present an efficient method of imaging 3D nanoscale lattice behavior and strain fields in crystalline materials with a new methodology -three dimensional Bragg projection ptychography (3DBPP). In this method, the 2D sample structure information encoded in a coherent high-angle Bragg peak measured at a fixed angle is combined with the real-space scanning probe positions to reconstruct the 3D sample structure. This work introduces an entirely new means of three dimensional structural imaging of nanoscale materials and eliminates the experimental complexities associated with rotating nanoscale samples. We present the framework for the method and demonstrate our approach with a numerical demonstration, an analytical derivation, and an experimental reconstruction of lattice distortions in a component of a nanoelectronic prototype device.Inversion methods provide a powerful alternative to traditional objective-lens-based microscopy. Techniques that numerically invert coherent diffraction patterns into real space images have provided substantial gains in resolution and sensitivity in certain optical, electron, and x-ray microscopy experiments, especially where image-forming lenses are inefficient or difficult to incorporate. The resulting images, formed by inverting reciprocal space diffraction patterns, contain quantitative information that encodes local physical parameters such as permittivity, density, and atomic displacement at sub-beam-size spatial resolutions.When implemented with hard x-rays, these coherent diffraction imaging (CDI) techniques have enhanced our understanding of the internal structure of nano-and meso-scale materials, especially in operating environments that are difficult to access with other probes. Furthermore, x-ray microscopy methods based on Bragg diffraction are of particular interest because the sensitivity of x-rays to crystalline distortions in materials can be leveraged to reveal the interplay between structure and properties without disturbing environmental boundary conditions. However, the routine application of inversion methods to coherent hard x-ray Bragg diffraction is still limited by stringent experimental requirements and long measurement times.Given the potential impact of non-destructive 3D structural microscopy and the limitations of current 3D Bragg coherent x-ray inversion methods, advances in Bragg phase retrieval methods that facilitate the rapid imaging of crystal lattice behavior in realistic environments are critically important. Here, we introduce a new coherent Bragg diffraction imaging approach, three dimensional Bragg projection ptychography (3DBPP), that provides such a capability. 3DBPP enables 3D image reconstruction from a series of 2D Bragg diffraction patterns measured at a single incident beam angle, thus forming a new mode of inversion-based 3D strain-sensitive imaging. As we discuss in this article, 3DBPP is a hybrid real / reciprocal space technique that takes advantage of the high angle of separation between the incident and diffracted beam in a Bra...

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Section: Methodsmentioning

confidence: 99%

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confidence: 99%

High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

et al. 2016

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“…We are convinced that this resolution performance can be extrapolated to the HXR region, as the autocorrelation analysis of the HXR range diffraction experiment supports sub-30 nm fullpitch resolution of the optic. The results show that ML-FZPs are up-and-coming for focusing of hard X-rays to nano-sized focal spots required for direct imaging [1,23,57,58], spectroscopy and for nano-diffraction [33][34][35]59,60] by using ML-FZPs. When compared with the conventional FZP manufacturing technique, namely the EBL, ML-FZPs present a number of interesting characteristics.…”

Section: Resultsmentioning

confidence: 99%

“…high DE, required for HXR. This would be extremely beneficial for materials analysis via HXR nanoprobe beamlines, for instance, in micro-nano-diffraction studies [33,34] to determine the crystal structure with high locality, in addition to high resolution imaging and chemical analysis via spectroscopic techniques, as multi-modal X-ray imaging is getting more and more important [35].…”

Section: Introductionmentioning

confidence: 99%

Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 12 keV

Keskinbora¹,

Robisch²,

Mayer³

et al. 2014

Opt. Express

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X-ray microscopy is a successful technique with applications in several key fields. Fresnel zone plates (FZPs) have been the optical elements driving its success, especially in the soft X-ray range. However, focusing of hard X-rays via FZPs remains a challenge. It is demonstrated here, that two multilayer type FZPs, delivered from the same multilayer deposit, focus both hard and soft X-rays with high fidelity. The results prove that these lenses can achieve at least 21 nm half-pitch resolution at 1.2 keV demonstrated by direct imaging, and sub-30 nm FWHM (fullpitch) resolution at 7.9 keV, deduced from autocorrelation analysis. Reported FZPs had more than 10% diffraction efficiency near 1.5 keV. ©2014 Optical Society of AmericaOCIS codes: (340.7460) X-ray microscopy; (340.0340) X-ray optics; (340.6720) Synchrotron radiation; (340.7480) X-rays, soft x-rays, extreme ultraviolet (EUV); (050.1965) Diffractive lenses; (220.4241) Nanostructure fabrication. References and links1. J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, "Zonedoubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy," J. Synchrotron Radiat. 19(5), 705-709 (2012). 2. E. Zschech, C. Wyon, C. E. Murray, and G. Schneider, "Devices, materials, and processes for nanoelectronics: characterization with advanced x-ray techniques using lab-based and synchrotron radiation sources," Adv. Eng. Mater. 13(8), 811-836 (2011 Schütz, "Fast spin-wave-mediated magnetic vortex core reversal," Phys. Rev. B 86(13), 134426 (2012). 5. J. Kirz and C. Jacobsen, "The history and future of X-ray microscopy," J. Phys. Conf. Ser. 186, 012001 (2009). 6. P. Kirkpatrick and A. V. Baez, "Formation of optical images by X-Rays," J. Opt. Soc. Am. 38(9), 766-774 (1948 International Journal of Optics 31(4), 403-413 (1984). 46. A. A. Michelson, Studies in Optics (Dover Publications, Incorporated, 1995. 47. G. R. Morrison, "Phase contrast and darkfield imaging in x-ray microscopy," Proc. SPIE 1741, 186-193 (1993).

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“…In this work, both average and spatially resolved synchrotron x-ray measurements were made using the Hard X-ray Nanoprobe beamline [15,16] after annealing the film in the stripe phase [17]. During the measurements, the sample was held under vacuum in the Nanoprobe chamber (1.8 × 10 −5 Torr) and oriented such that the substrate miscut azimuth was normal to the scattering plane.…”

Section: Imaging Local Polarization In Ferroelectric Thin Films By Comentioning

confidence: 99%

Imaging Local Polarization in Ferroelectric Thin Films by Coherent X-Ray Bragg Projection Ptychography

et al. 2013

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A hard X-ray nanoprobe beamline for nanoscale microscopy

Cited by 172 publications

References 29 publications

High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 12 keV

Imaging Local Polarization in Ferroelectric Thin Films by Coherent X-Ray Bragg Projection Ptychography

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