A high excitation magnetic quadrupole lens quadruplet incorporating a single octupole lens for a low spherical aberration probe forming lens system

Dou, Yanxin; Jamieson, David N.; Liu, Jianli; Li, Liyi

doi:10.1016/j.nimb.2018.02.001

Cited by 4 publications

(1 citation statement)

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“…If the influence of the latter can be limited by improving the energy spread of the ions in the beam to 10 -5 [13], then spherical aberrations have to be compensated by a system of octupole lenses. In [14][15][16][17] were considered octupole correctors in quadrupole probe-forming systems with low demagnifications, which did not lead to the desired results. Since these systems have low spherical aberrations, reducing them leads to a mismatch between the beam emittance and the acceptance of the probe-forming system and does not increase the focused beam current.…”

Section: Introductionmentioning

confidence: 99%

High Resolution Probe-Forming System With Spherical Aberration Correction for Nuclear Microprobe

Ponomarev¹,

Kolinko²,

Polozhii³

et al. 2023

Problems of Atomic Science and Technology

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A probe-forming system based on a separate orthomorphic quadruplet of magnetic quadrupole lenses with a short working distance is considered, allowing the system demagnification to be significantly increased. Three magnetic octupole lenses are used to correct spherical aberrations. The parameters of the octupole corrector are calculated using the matricant method. The focusing properties of the system are determined by means of a probe formation optimization process based on the value of the maximum reduced collimated acceptance. The calculations performed showed the feasibility of such a probe forming system for microanalysis and proton beam writing technique.

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