A High-g Triaxial Piezoresistive Accelerometer with Sensing Beams in Pure Axial Deformation

Yu, Mingzhi; Zhao, Libo; Chen, Jia; Wang, Hongyan; Zhao, Yulong; Jiang, Zhuangde

doi:10.1109/nems.2019.8915619

Cited by 4 publications

(3 citation statements)

References 8 publications

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“…Yu et al simulated a triaxial sensor that has a very high acceleration range, 1.2 μV/( g /V) theoretical sensitivity and resonant frequency of 1 MHz. The sensing part of the x - and y -axes have a similar structure by creating a half-open-loop Wheatstone bridge while the z -axis requires a full Wheatstone bridge …”

Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

“…The sensing part of the x-and y-axes have a similar structure by creating a half-open-loop Wheatstone bridge while the z-axis requires a full Wheatstone bridge. 33 Piezoelectric Accelerometers. A piezoelectric accelerometer is composed of a mass attached to a piezoelectric material; when subjected to acceleration, the mass remains undisturbed due to inertia, but the mass compresses and stretches the piezoelectric which generates a charge in proportion to the acceleration.…”

Section: ■ Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

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Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers' sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

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Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

Section: ■ Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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“…This will allow for low-cost customizable nanopositioning architectures with integrated position sensing to be created [1,2] for a range of micro-/nano-manufacturing and metrology applications. Customized positioning platforms can surmount one of the main hurdles to nanomanufacturing research and development [3][4][5][6][7][8], as well as enable further developments through cost and customization benefits in personalized medicine [7], high-performance and parallel atomic force microscopy (AFM) metrology [6,[9][10][11][12], improving accelerometers [13][14][15], and advanced memory storage [4,16]. This will accelerate the testing and development of new micronano fabrication processes, especially those using arrays [5].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

Panas

Culpepper

2021

Journal of Micro and Nano-Manufacturing

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A process flow is described for the low cost, flexible fabrication of metal MEMS with high performance integrated sensing. The process is capable of producing new designs in ≈ 1 week at an average unit cost of <$1k/device even at batch sizes of ≈ 1-10, with expected sensing performance limits of about 135dB over a 10khz sensor bandwidth. This is a ≈20x reduction in cost, ≈25x reduction in time, and potentially >30x increase in sensing dynamic range over comparable state-of-the-art compliant nanopositioners. The Non-Lithographically Based Microfabriction (NLBM) process is uniquely suited to create high performance nanopositioning architectures which are customizable to the positioning requirements of a range of nanoscale applications. These can significantly reduce the cost of nanomanufacturing research and development, as well as accelerate the development of new processes and the testing of fabrication process chains without excess capital investment. A 6-DOF flexural nanopositioner with integrated sensing for all 6-DOF was fabricated using the newly developed process chain. The fabrication process was measured to have ≈30µm alignment. Sensor arm, flexure, and trace widths of 150µm, 150µm and 800µm, respectively, were demonstrated. Process capabilities suggest lower bounds of 25 µm, 50µm and 100µm, respectively. Dynamic range sensing of 52dB was demonstrated for the nanopositioner over a 10kHz sensor bandwidth. Improvements are proposed to approach sensor performance of 132dB over a 10kHz sensor bandwidth.

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Three-axis Piezoresistive MEMS Accelerometer with Extended Twin Mass Structure

Raeann,

Singh,

Seena

2020

2020 5th IEEE International Conference on Emerging Electronics (ICEE)

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A High-g Triaxial Piezoresistive Accelerometer with Sensing Beams in Pure Axial Deformation

Cited by 4 publications

References 8 publications

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

Three-axis Piezoresistive MEMS Accelerometer with Extended Twin Mass Structure

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