2016
DOI: 10.1007/s13320-016-0316-x
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A high sensitivity pressure sensor based on two-dimensional photonic crystal

Abstract: Abstract:In this paper, we propose and simulate a pressure sensor based on two-dimensional photonic crystal with the high quality factor and sensitivity. The sensor is formed by the coupling of two photonic crystal based waveguides and one nanocavity. The photonic crystal with the triangular lattice is composed of GaAs rods. The detailed structures of the waveguides and nanocavity are optimized to achieve better quality factor and sensitivity of the sensor. For the optimized structures, the resonant wavelength… Show more

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Cited by 35 publications
(9 citation statements)
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“…From this figure we see clearly that the sensitivity of sensor can reach 15.8 nm/GPa, the results show that the sensitivity decreases and reaches the lowest value of sensitivity 10.15 nm/GPa. Comparing with other pressure sensor using PhCs which has a sensitivity of about 13.9 nm/GPa under the dynamic range between 0 and 2 GPa [9] our designed sensor has higher sensitivity.…”
Section: D Sensor Designmentioning
confidence: 79%
“…From this figure we see clearly that the sensitivity of sensor can reach 15.8 nm/GPa, the results show that the sensitivity decreases and reaches the lowest value of sensitivity 10.15 nm/GPa. Comparing with other pressure sensor using PhCs which has a sensitivity of about 13.9 nm/GPa under the dynamic range between 0 and 2 GPa [9] our designed sensor has higher sensitivity.…”
Section: D Sensor Designmentioning
confidence: 79%
“…Thus, inorganic piezoelectric materials like GaAs, In 2 O 3 , ZnO, etc. were also studied for flexible pressure sensing devices . Mechanical flexible polymers or other suitable substrates are often used to assemble these fragility crystalline materials into tactile sensors.…”
Section: Wearable Sensor Applicationsmentioning
confidence: 99%
“…A point defect embedded in the PC structure, that acts as a micro-cavity, can trap the light. So far, a few PC-based structures have been suggested for strain/stress [12][13][14][15], and pressure sensor [16][17][18][19][20][21][22][23][24].…”
Section: Introductionmentioning
confidence: 99%
“…In 2014, Shanthi et al [21] proposed a 2D PC pressure sensor that consists of two PC quasi waveguides and L3 defect that is placed in between the two quasi waveguides. In 2016, Tao et al [22] proposed a 2D PC pressure sensor that consists of two PC quasi waveguides and an optimized nanocavity that is placed in between the two quasi waveguides. In 2017, Wong et al [23] realized and simulated (using FEM analysis and also rigorous coupled-wave analysis) a pressure sensor using PC mirror pressure-sensing diaphragms with silicon-on-nothing (SON) reference cavities.…”
Section: Introductionmentioning
confidence: 99%