1989
DOI: 10.1002/jemt.1060120312
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A high‐voltage scanning transmission electron microscope at Nagoya University

Abstract: A high-voltage scanning transmission electron microscope (STEM) H-1250ST of the maximum accelerating voltage of 1.25 MV was constructed at Nagoya University in 1983. The microscope, equipped with a field-emission gun, is designed with high-level STEM performance as well as conventional transmission microscopy mode operation. The aim of developing the microscope, basic design schemes, principal instrumentation, and techniques developed are described.

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Cited by 7 publications
(5 citation statements)
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“…Therefore, they have to be corrected simultaneously. A number of different concepts-time dependent fields [21][22][23] grid and foils in the electron path [24,25], numerical image reconstruction from a defocus series [26] and electron mirrors [27][28][29]-have been proven theoretically and experimentally capable for this purpose. However, up to now, the aberration correction in a LEEM or PEEM system could not yet successfully improve the lateral resolution.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, they have to be corrected simultaneously. A number of different concepts-time dependent fields [21][22][23] grid and foils in the electron path [24,25], numerical image reconstruction from a defocus series [26] and electron mirrors [27][28][29]-have been proven theoretically and experimentally capable for this purpose. However, up to now, the aberration correction in a LEEM or PEEM system could not yet successfully improve the lateral resolution.…”
Section: Introductionmentioning
confidence: 99%
“…The first is in its high efficiency of defect introduction [4]. For A high voltage electron microscope H-1250ST at Nagoya University has functions of both scanning transmission electron microscopy (STEM) and conventional transmission microscopy (CTEM) [5]. Using this advantageous features, it is possible to perform the observation of structural changes by electron irradiation with its CTEM, and to control electron beam with scanning coil of STEM.…”
mentioning
confidence: 99%
“…3 The preconditions for the validity of Scherzer's theorem are round lenses, real images, static fields, no space charge, and that the potential and its derivative are continuous. 10 None of the proposals in connection with high-frequency lenses or grids or foils could be experimentally realized successfully; for a review, see Ref. Despite numerous attempts based on different methods only the use of multipole correctors in highresolution transmission electron microscopy and also in scanning electron microscopy was successful up to now ͑see, e.g., Ref.…”
Section: Ways To Circumvent Preconditions Of Scherzer's Theoremmentioning
confidence: 99%