A highly transparent haptic device with an extremely low driving voltage based on piezoelectric PZT films on glass

Hua, H.; Chen, Youru; Tao, Yongchun; Qi, Dexing; Li, Yanzhao

doi:10.1016/j.sna.2022.113396

Cited by 14 publications

(11 citation statements)

References 42 publications

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“…The electrical functionality of the fabricated capacitors is also evidenced, but with very moderate properties compared to standard PZT deposited on silicon substrate. It is important however to note that Hua et al very recently reported encouraging results about sol-gel PZT films deposited on ITO/glass substrate [8]. The PZT film crystallized at 650°C is poly-oriented and the piezoelectric stack shows transparency of around 75 %.…”

Section: Introductionmentioning

confidence: 96%

“…In most cases, the piezoelectric material is integrated on silicon substrate, but we see those recent years emerging applications aiming at functionalizing glass and flexible substrates. Additionally, transparency is sometimes highly desired for transducers and actuator functions in application domains like photoacoustic imaging [4][5][6], haptics [7][8] and acoustic [9].…”

Section: Introductionmentioning

confidence: 99%

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Highly transparent PZT capacitors on glass obtained by layer transfer process

Rhun

Pavageau

Wagué

et al. 2022

J Mater Sci: Mater Electron

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Transparent ITO/PZT/ITO capacitors were fabricated on 200 mm glass substrate. The PZT films of 1 µm and 2 µm thickness were first grown on platinized Si wafer by sol-gel method, and then transferred onto glass substrate together with ITO electrodes following an innovative process. The obtained PZT based stacks on glass show an average transmission of about 70 % in the visible range. PZT films keep their preferred (100) orientation after transfer process. The capacitors exhibit ferroelectric, dielectric and piezoelectric properties comparable to standard non-transparent PZT films with metal electrodes. Transverse piezoelectric coefficient e31,f as high as 16 C/m² was measured for both PZT film thicknesses. This proof of concept opens the way to the fabrication of transparent piezoelectric actuators on glass for high performances haptic devices, as well as for other emerging applications like self-cleaning or functionalization of smart windows.

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Section: Introductionmentioning

confidence: 96%

Section: Introductionmentioning

confidence: 99%

Highly transparent PZT capacitors on glass obtained by layer transfer process

Rhun

Pavageau

Wagué

et al. 2022

J Mater Sci: Mater Electron

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show abstract

“…Emerging applications such as micro-mirror for LIDAR, haptics for humanmachine interfaces, micro-pumps, as well as PMUT for fingerprint, medical probe or gesture recognition are also based on thin film PZT actuators [3]. In recent years, transparent piezoelectric thin films are showing growing interest for transducers and actuator functions in application domains like photoacoustic imaging [4][5][6], haptics [7,8] and acoustics [9].…”

Section: Introductionmentioning

confidence: 99%

“…On the contrary, Hua et al recently reported very encouraging results about sol-gel PZT films deposited on ITO/glass substrate. While the PZT film is not oriented and the resistance sheet of the 500 nm thick ITO bottom electrode is increased by a factor 10 after annealing at 650°C, the PZT stack shows transparency of around 75 % and excellent piezoelectric performances [8]. However, an optimization of the process is required for controlling the PZT film orientation, and maybe also for decreasing the ITO bottom electrode thickness.…”

Section: Introductionmentioning

confidence: 99%

Highly transparent piezoelectric PZT membranes for transducer applications

Pavageau

Dieppedale²,

Perreau³

et al. 2022

Sensors and Actuators A: Physical

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“…They were able to induce a standing quasi-transverse antisymmetric (A 0 ) Lamb wave with out-of-plane displacement of 1 µm at 30 V. [4,9] Fully transparent friction-modulation devices based on Pb(Zr,Ti)O 3 (PZT) thin-film technology have been recently reported. [10][11][12][13] PZT is the champion piezoelectric material with several times higher piezoelectric coefficients compared to AlN. [14] Using interdigitated (IDE) indium tin oxide (ITO) electrodes, we developed transparent transducers with average transmittance exceeding 75% in the visual range.…”

Section: Introductionmentioning

confidence: 99%