A hybrid control approach for precise positioning of a piezo-actuated stage

Hysteretic non‐linearity observer design and robust control for piezoelectric actuators

“…In this section, a numerical example is used to illustrate the effectiveness of the developed control system. The values of PEA are taken from the previous work [15], which are given in Table 1.…”

“…However, since the creep and temperature effects cannot be ignored in high frequency, the application of inverse hysteresis models is limited [15]. To overcome these phenomena, the hysteresis observer has attracted considerable attention.…”

“…As the hysteretic effect can be considered as a bounded disturbance, a hysteresis observer is proposed in [16], and a Kalman filter‐based non‐linearity observer is established in [17]. Luenberger‐wise observer is studied in [15, 18, 19].…”

“…An adaptive backstepping controller is proposed in [20]. A PID sliding model controller is designed in [5], in which a XY parallel micromanipulator is used to verify the control algorithm, and PID control for PEA system can be seen in [8, 15, 16].…”

Implementation and experiment of a novel piezoelectric-spring stage for rapid high-precision micromotion

“…The experiments showed that the method could help the operator in achieving a 0.2 lm positioning accuracy under a 10 Hz motion frequency and a 0.12 mm/s velocity. Hafea et al (2014) designed a PZT-actuated precision positioning mechanism for the applications of high response positioning; a feedforward compensation model combined with a PID controller compensated for the micromotion error. Based on experimental results, the maximum position error could be reduced from 12.43 lm to 0.127 lm under a motion frequency of 1 Hz at a velocity of approximately 0.15 mm/s.…”