2012
DOI: 10.1088/0741-3335/54/9/095006
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A kinetic trajectory simulation model for magnetized plasma sheath

Abstract: The plasma-sheath region in an oblique magnetic field has been studied using a kinetic trajectory simulation model. It has been observed that the magnetized plasma-sheath region has two distinct regions: magnetic field dominant region lying close to the sheath entrance and electric field dominant region (almost no effect of magnetic field) lying close to the wall. The particle densities and potential decrease as we move towards the wall, which becomes prominent as the strength and obliqueness of the magnetic f… Show more

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Cited by 27 publications
(39 citation statements)
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“…In this section we describe a numerical model of the 1D electrostatic rf sheath in a plasma-filled parallel-plate model, which generalizes our previous model 22 to include the effects of arbitrary ion magnetization, ion mobility and arbitrary magnetic field angle with respect to the 5 sheath. Viewed another way, this work generalizes work on steady state (dc) oblique angle sheaths and the magnetic presheath [32][33][34][35][36][37][38][39] to include rf sheath effects.…”
Section: Sheath Model Equationsmentioning
confidence: 91%
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“…In this section we describe a numerical model of the 1D electrostatic rf sheath in a plasma-filled parallel-plate model, which generalizes our previous model 22 to include the effects of arbitrary ion magnetization, ion mobility and arbitrary magnetic field angle with respect to the 5 sheath. Viewed another way, this work generalizes work on steady state (dc) oblique angle sheaths and the magnetic presheath [32][33][34][35][36][37][38][39] to include rf sheath effects.…”
Section: Sheath Model Equationsmentioning
confidence: 91%
“…The other energy source in the present model is the dissipation of rf power in the sheath. This electrical power is supplied by the rf wave and is given by 1 JV A P  (35) where J and V 1 are the total rf current and voltage across the sheath, with the former given by Eq. (24).…”
Section: Sheath Power Dissipationmentioning
confidence: 99%
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“…Closing to the wall is the usual electrostatic sheath, also known as the Debye sheath and the magnetic presheath, known as the Chodura sheath near the plasma boundary. Various approaches have been proposed to explain the properties of plasma sheath and are still a subjected of interest [2][3][4][5][6][7][8][9][10][11].…”
mentioning
confidence: 99%
“…The study of magnetized plasma sheath is one of the important research problems in plasma experiments, so the correlative works both of experiment and theory are developed greatly during the past several years [1][2][3][4], and significant number of work have been done in recent time [5][6][7][8] by using different models. Calculation of the ion flux from plasma to a surface of a cathode is one of the key problems of a theory of a plasma-surface interaction.…”
mentioning
confidence: 99%